IC Inspection Image Distortion Correction Using Higher Order Models
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Solution Overview
Problem
Existing inspection systems struggle to correct higher order distortions in images of integrated circuits, leading to inaccurate representation of features, as lower order polynomial expressions fail to accurately characterize these distortions, particularly due to distortions caused by digital to analog converters in inspection systems.
Innovation Solution
The system adjusts images by determining alignment or position differences between features in the image and layout data, using higher order models to correct for distortions, and adjusts the spatial position of pixels to minimize distortion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If lower order polynomial expressions are used to correct distortions, then the device complexity is reduced, but the measurement precision deteriorates because they fail to accurately characterize higher order distortions
Solution Approach 1:
The patent changes the order of the polynomial expression from lower order (e.g., 2nd order) to higher order (e.g., 3rd order or above) to accurately characterize higher order distortions caused by digital to analog converters. This parameter change enables the distortion correction model to capture non-linear distortion patterns that lower order models cannot represent, thereby improving measurement precision while accepting increased computational complexity.
2Measurement precision
If higher order polynomial expressions are used to correct distortions, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The patent performs preliminary characterization of distortion patterns by analyzing alignment differences between imaged features and layout data before implementing the higher order correction model. By pre-determining the distortion fingerprint and fitting higher order polynomial coefficients in advance, the system prepares the correction parameters beforehand, which reduces real-time computational complexity while maintaining high measurement precision during actual inspection operations.
Data Source
AI summary
Systems, apparatuses, and methods for adjusting distortion in images. Embodiments include obtaining a plurality of images; determining alignment differences between a plurality of features on the plurality of images and corresponding features in layout data corresponding to the plurality of images; modeling the alignment differences; and adjusting at least one of: a machine setting corresponding to obtaining the plurality of images; or at least one feature of the plurality of features on at least one image of the plurality of images using the modeling.