IC Layer Revision Tracking via Parameterized PCells

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Solution Overview

Problem

Current integrated circuit fabrication processes face challenges in accurately tracking and identifying revisions and variants of circuit layers, leading to ambiguity and errors in design changes, inconsistencies in identifier information, and increased potential for human error during the design and fabrication process.

Innovation Solution

Implementing a system that uses layer identification information, including layerID PCells and BooleanID PCells, generated by electronic design automation software, to provide a standardized labeling scheme for tracking and identifying individual layers of integrated circuits independently of other layers, allowing for automated tracking and verification, and reducing errors by ensuring correct mask combinations during the photolithography process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a standardized labeling scheme with layerID PCells is implemented, then tracking precision and identification accuracy of layer revisions are improved, but device complexity and implementation effort increase

Engineering Contradiction:
Improvelayer revision identification accuracyVSAvoidlabeling system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The labeling system divides the identification task into separate layer-specific components. Each layer receives its own unique layerID PCell with specific identifier characters, allowing independent tracking of each layer's revision status without requiring complex cross-layer coordination.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The layerID PCells and identifier structures are pre-configured and integrated into the photomask design data during the EDA phase. This preliminary labeling ensures that identification information is embedded before fabrication, eliminating the need for post-manufacturing identification efforts.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If independent layer tracking is implemented using identifier characters and structures, then reliability of layer revision identification is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvelayer change tracking reliabilityVSAvoidphotomask fabrication complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The identification elements (layerID PCells, identifier characters, comb structures) are merged directly into the photomask pattern data during EDA. This integration means the identification structures are fabricated simultaneously with the circuit patterns using the same photolithography process, eliminating separate manufacturing steps.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The photomask design system automatically generates and places the appropriate layerID PCells and identifier structures during the circuit design process. The system self-configures the identification information based on the layer parameters, reducing manual intervention and potential errors.

Inventive Principle:
Principle #25Self-service

3Productivity

If automated tracking systems with parameterized data cells are used, then productivity and error reduction are improved, but initial implementation time and resource requirements increase

Engineering Contradiction:
Improvedesign process efficiencyVSAvoidsystem implementation time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The manual tracking and verification processes are replaced with automated EDA-based systems that programmatically generate layerID PCells and manage identifier assignments. This automation eliminates manual bookkeeping of layer revisions and reduces human error in tracking changes across multiple layers.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system uses parameterized PCells where identification characteristics can be dynamically configured based on layer-specific parameters. This flexibility allows the same basic framework to adapt to different design complexities without requiring complete system redesign, reducing long-term implementation time.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10068046B2Systems and methods for tracking changes to and identifying layers of integrated circuit devices
Publication Date: 2018.09.04 SILICON LABORATORIES INC
  • US10068046B2 patent drawing
  • US10068046B2 patent drawing
  • US10068046B2 patent drawing

AI summary

Systems and methods are provided that may be implemented to identify and track layer changes of an integrated circuit (IC) device, e.g., during any one of circuit design, pattern generation, device fabrication and/or chip failure analysis processes. Multiple revisions and variants of different IC layers may be identified and tracked using a tracking system and standardized labeling scheme that employs a combination of identifier characters and identifier structures that may be further implemented using revision layer identification parameterized cells (layerID PCells and BooleanID PCells) that include such identifier characters and/or structures The disclosed tracking systems may be further implemented in an automated manner and/or in a manner that allows programming of various parts/aspects and layerID PCells and BooleanID PCells of the tracking system.