IC Layout Coloring via Cell Block Segmentation
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Solution Overview
Problem
Current semiconductor integrated circuit (IC) design methods face challenges in efficiently coloring layouts for double or multi-patterning processes, particularly due to the complexity and time required for photolithography processes, which can be reduced by separating the design area into cell blocks and individually coloring each block to satisfy design rules.
Innovation Solution
The method involves separating the design area into cell blocks with minimum distances defined by design rules, designing layouts within these blocks, and individually coloring each block, which can be performed sequentially or simultaneously using a layout decomposition tool, allowing for proportional data processing capability and reduced operations compared to traditional methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the design area is separated into cell blocks with minimum distances, then the coloring process time and complexity are reduced, but the device complexity increases due to additional separation structures
Solution Approach 1:
The design area is divided into multiple cell blocks separated by break cells, allowing each block to be colored independently. This segmentation reduces the coloring process time and complexity by enabling parallel processing of multiple blocks, while the break cells provide the necessary separation according to design rules.
2Manufacturing precision
If individually coloring is performed for each cell block, then manufacturing precision is improved by satisfying design rules, but the overall process complexity increases
Solution Approach 1:
By segmenting the layout into cell blocks separated by break cells, each block can be colored independently to ensure compliance with design rules. The break cells act as separators that maintain minimum distances and enable precise control over the coloring process for each block.
Solution Approach 2:
Break cells serve as intermediary elements between adjacent cell blocks. These break cells maintain the required minimum distances between blocks and facilitate the individual coloring process while ensuring overall design rule compliance.
3Productivity
If break cells are disposed within the design area to separate cell blocks, then the coloring process becomes more efficient, but the area occupied by break cells increases
Solution Approach 1:
The design area is segmented into cell blocks using break cells, which enables efficient parallel coloring processing. The break cells are strategically placed to minimize the total area they occupy while still providing necessary separations for independent coloring of each block.
Data Source
AI summary
A method can include separating a design area of a substrate for a semiconductor integrated circuit (IC) into cell blocks, where a distance between adjacent ones of the cell blocks can be greater than or equal to a minimum distance defined by a design rule for the semiconductor integrated circuit to provide separated cell blocks, designing a layout for the semiconductor IC in the separated cell blocks, and individually coloring the layout of each of the separated cell blocks.