IC Layout Minimum Repeat Unit Detection for Periodic Patterns
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Solution Overview
Problem
The manual determination of a minimum repeat unit in integrated circuit (IC) layouts is time-consuming and limits productivity, hindering efficient simulations and verifications during IC manufacturing.
Innovation Solution
A method to automatically determine the minimum repeat unit in IC layouts using a processor, analyzing edge patterns and generating hash codes to identify periodicity, allowing for the correction of layouts based on the determined minimum repeat unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a user manually determines the minimum repeat unit in the layout, then the simulation and verification can be performed, but it takes much time and reduces productivity
Solution Approach 1:
The system performs self-service by automatically determining the minimum repeat unit through processor-based analysis of layout data, eliminating the need for manual user determination. The processor autonomously identifies periodic patterns, calculates repeat units, and reconstructs hierarchies without human intervention, thereby resolving the contradiction between accuracy and productivity.
Solution Approach 2:
The manual mechanical process of visually inspecting and determining minimum repeat units is replaced with an automated computational system. The processor uses algorithms to analyze layout data, detect periodicity, and calculate repeat units, substituting human manual work with automated mechanical/computational processes to improve productivity while maintaining accuracy.
2Measurement precision
If a user manually determines the minimum repeat unit in the layout, then the simulation can be performed, but there are limitations in tasks such as reconstruction of hierarchies
Solution Approach 1:
The automated system provides multi-functionality by not only determining the minimum repeat unit but also automatically reconstructing hierarchies and performing various layout analysis tasks. The processor-based approach is universally applicable to different layout configurations and task requirements, eliminating the limitations of manual methods and enhancing adaptability.
Solution Approach 2:
The system performs multiple tasks autonomously including minimum repeat unit determination, hierarchy reconstruction, and layout analysis without requiring manual user input for each task. This self-service capability enhances versatility by allowing the system to handle various tasks that were previously limited by manual determination constraints.
3Loss of time
If the minimum repeat unit is manually determined, then time is spent on determination, but automatic determination methods do not exist
Solution Approach 1:
The manual mechanical determination process is completely replaced with automated computational mechanics. The processor uses algorithms to automatically analyze layout data, detect periodic patterns, and calculate minimum repeat units, achieving full automation and eliminating time loss associated with manual determination.
Solution Approach 2:
The system achieves self-service by autonomously performing the entire minimum repeat unit determination process without human intervention. The processor automatically processes layout data, identifies patterns, and generates results, thereby eliminating the time loss incurred by manual determination while achieving complete automation.
Data Source
AI summary
A method of manufacturing an integrated circuit device using a layout, the layout including patterns having edges, includes determining whether periodicity exists in a search region of the layout from values of a first shortest separation distance in a first direction and values of a second shortest separation distance in a second direction between edges, based on hash codes obtained from length information and direction information about edges in the search region and distance information between the edges, wherein the second direction is perpendicular to the first direction. When it is determined that the layout has periodicity in the search region, a unit region that has a smallest width corresponding to a first least common multiple of values of the first shortest separation distance and a smallest height corresponding to a second least common multiple of values of the second shortest separation distance is determined as a minimum repeat unit.