Integrated Circuit Package Sidewall EMI Shielding

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Solution Overview

Problem

Current integrated fan-out packages face challenges in effectively shielding electromagnetic interference (EMI) while maintaining compactness and efficiency in semiconductor component integration.

Innovation Solution

The process involves forming conductive pillars on semiconductor dies, encapsulating them with a protection material, and then integrating an electromagnetic interference shielding layer that is electrically grounded and covers the sidewalls, which is subsequently encapsulated with an insulating material to protect and shield the components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If an electromagnetic interference shielding layer is conformally formed on the appearance of the package, then EMI shielding is improved, but the compactness and integration density are reduced

Engineering Contradiction:
ImproveEMI shieldingVSAvoidpackage compactness
Core Design Contradiction:
Object-affected harmful factorsVSVolume of moving object

Solution Approach 1:

The shielding layer is selectively formed only on the sidewalls of the semiconductor die that are exposed after encapsulation, rather than conformally coating the entire package appearance. This localized approach provides EMI shielding where most needed while minimizing volume consumption.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The shielding function is integrated into the vertical sidewall structure of the die rather than adding a horizontal conformal layer on the package exterior. This dimensional repositioning maintains compactness by utilizing existing structural space.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Object-affected harmful factors

If a conformal EMI shielding layer is formed on the package appearance, then EMI shielding is improved, but the manufacturing complexity increases

Engineering Contradiction:
ImproveEMI shieldingVSAvoidmanufacturing process complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The shielding layer is formed on the die sidewalls before the final encapsulation step, when the sidewalls are naturally exposed. This preliminary formation eliminates the need for subsequent complex conformal coating processes on the finished package.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The encapsulation process itself creates the exposed sidewall structure that the shielding layer needs to cover. The manufacturing process automatically provides the ideal substrate geometry for the shielding layer without requiring additional shaping or preparation steps.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively shields EMI, protects the semiconductor components, and maintains the compactness and efficiency of integrated fan-out packages by ensuring the conductive pillars are accessible and the shielding layer is integrated within the package structure.

Implementation Method 1

an electromagnetic interference shielding layer which is conformally formed on the appearance of the packages may be used to shield EMI from environment

Methodology Applied
Scientific EffectElectromagnetic interference shielding: Faraday Cage

Data Source

PatentUS10134685B1Integrated circuit package and method of fabricating the same
Publication Date: 2018.11.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10134685B1 patent drawing
  • US10134685B1 patent drawing
  • US10134685B1 patent drawing

AI summary

An integrated circuit package including at least one integrated circuit component, at least one electromagnetic interference shielding layer and an insulating encapsulation is provided. The at least one integrated circuit component includes an active surface, a plurality of sidewalls connected to the active surface and a plurality of conductive pillars protruding from the active surface. The at least one electromagnetic interference shielding layer covers the sidewalls of the at least one integrated circuit component, and the at least one electromagnetic interference shielding layer is electrically grounded. The insulating encapsulation encapsulates the at least one integrated circuit component and the at least one electromagnetic interference shielding layer, and the conductive pillars of the at least one integrated circuit component are accessibly exposed by the insulating encapsulation. Methods of fabricating the integrated circuit package are also provided.