Integrated Circuit Package Via Geometry for Delamination Resistance

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Solution Overview

Problem

The challenge in semiconductor packaging is the concentration of stress at the interfaces between through vias and encapsulants, leading to delamination and cracking, which reduces the reliability of the package.

Innovation Solution

Forming through vias with curved sidewalls, such as hourglass or bulged rectangle shapes, to distribute stress more evenly and reduce the risk of delamination and cracking at the via-encapsulant and via-under-bump metallurgy layer junctions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If through vias with straight sidewalls are formed, then the manufacturing process is simple, but stress concentrates at the interfaces between through vias and encapsulants, leading to delamination and cracking

Engineering Contradiction:
Improvepackage reliabilityVSAvoidvia structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies curvature to the sidewalls of through vias, transitioning from straight sidewalls to curved sidewalls with specific radii of curvature. This curvature distributes stress more evenly at the interfaces between through vias and encapsulants, preventing stress concentration that leads to delamination and cracking. The curved geometry modifies the stress distribution pattern without fundamentally changing the via formation process.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Reliability

If through vias with curved sidewalls are formed, then stress concentration is reduced and delamination is minimized, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvepackage reliabilityVSAvoidvia formation ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent modifies the geometric parameters of through vias by introducing controlled curvature with specific radii of curvature. This parameter change transforms the sidewall geometry from straight to curved, achieving stress distribution optimization. The curvature radius is carefully selected to balance stress reduction benefits with manufacturing feasibility, ensuring the modified geometry can be achieved through standard fabrication processes.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS12550784B2Integrated circuit packages and methods of forming the same
Publication Date: 2026.02.10 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12550784B2 patent drawing
  • US12550784B2 patent drawing
  • US12550784B2 patent drawing

AI summary

In an embodiment, a device includes: an integrated circuit die including a die connector; a dielectric layer on the integrated circuit die; an under-bump metallurgy layer having a line portion on the dielectric layer and having a via portion extending through the dielectric layer to contact the die connector; a through via on the line portion of the under-bump metallurgy layer, the through via having a first curved sidewall proximate the die connector, the through via having a second curved sidewall distal the die connector, the first curved sidewall having a longer arc length than the second curved sidewall; and an encapsulant around the through via and the under-bump metallurgy layer.