IC Recipe Similarity Evaluation Using Tool-Log Comparison

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Solution Overview

Problem

Current IC manufacturing processes face challenges in efficiently evaluating the similarity between different recipes without accessing restricted recipe data and relying on naming conventions, which hinders process improvement and tool performance monitoring.

Innovation Solution

A method and system for evaluating IC manufacturing recipe similarity by comparing tool-log results from different recipes, assigning similarity values, and calculating a recipe similarity value based on these comparisons, allowing for flexible criteria application and tool performance monitoring without accessing the recipes or relying on naming conventions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If recipe data is accessed directly for similarity evaluation, then evaluation accuracy is improved, but data access restrictions and security concerns worsen

Engineering Contradiction:

Improvesimilarity evaluation accuracyVSAvoiddata access restrictions

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces tool-log data as an intermediary medium between the recipe data and the similarity evaluation system. Instead of directly accessing restricted recipe data, the system uses tool-log entries generated during tool operations as indirect representations of recipe execution. This intermediary approach allows similarity evaluation without violating data access restrictions or security protocols.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent creates a copy or representation of recipe characteristics through tool-log data. Rather than accessing the original recipe data directly, the system analyzes copied information embedded in tool-log entries, which contain operational results and measurements that reflect recipe execution without exposing the actual recipe data.

Inventive Principle:

Principle #26Copying

2Ease of operation

If naming conventions are used for recipe identification, then simplicity is improved, but reliability and precision of similarity evaluation worsen

Engineering Contradiction:

Improverecipe identification simplicityVSAvoidsimilarity evaluation precision

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The patent replaces the mechanical/naming-based system of recipe identification with a data-driven analytical system. Instead of relying on naming conventions to identify and compare recipes, the system uses automated analysis of tool-log data containing actual operational results, measurements, and process parameters to objectively determine recipe similarity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements feedback loops where tool-log data from actual tool executions is continuously analyzed and used to refine similarity evaluations. The system compares operational results and measurements from multiple tool-log entries, using this feedback to accurately assess recipe similarity without relying on potentially misleading naming conventions.

Inventive Principle:

Principle #23Feedback

3Adaptability or versatility

If manual recipe comparison methods are used, then flexibility in criteria application is improved, but engineering time and productivity worsen

Engineering Contradiction:

Improvecriteria application flexibilityVSAvoidengineering time

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent implements a self-service system where the automated analysis platform performs recipe similarity evaluation without requiring manual intervention. The system automatically retrieves tool-log data, applies evaluation criteria, performs comparisons, and generates results autonomously, eliminating the need for manual recipe comparison while maintaining flexible criteria application.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent enables flexible criteria application through parameter-based configuration of the automated analysis system. Users can modify evaluation parameters, thresholds, and criteria weights to adapt the system to different similarity assessment needs, while the automated processing maintains high productivity by handling these parameter changes without manual comparison work.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS11481531B2IC manufacturing recipe similarity evaluation methods and systems

Publication Date: 2022.10.25 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A method includes, for a first tool-log variable of a set of tool-log variables, comparing a first tool-log variable result from a first integrated circuit (IC) manufacturing recipe to a first tool-log variable result from a second IC manufacturing recipe. The set of tool-log variables corresponds to one or more tool-logs generated from execution of the first IC manufacturing recipe and the second IC manufacturing recipe on an IC manufacturing tool. Based on the comparison, performing an operation of generating instructions to add one of the first IC manufacturing recipe or the second IC manufacturing recipe to an IC manufacturing recipe library, or performing an operation of generating a defense report for one of the first IC manufacturing recipe or the second IC manufacturing recipe.