IC Routing Zone Decomposition for Double Patterning
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Solution Overview
Problem
Integrated circuit (IC) designs utilizing double patterning technology (DPT) face inefficiencies due to routing jogs, which often lead to odd cycles that degrade routing efficiency and require complex stitch-aware routing tools, making it difficult to implement additional route patterns for jogging functions.
Innovation Solution
Designating a portion of a filler cell as a routing zone in the IC, ensuring routes placed within this zone are decomposable with others outside, and maintaining a critical distance from the zone's edge to avoid design rule check errors, thereby simplifying the implementation of jogging functions without needing stitch-aware tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If routing jogs are used to improve routing efficiency, then routing efficiency improves, but odd cycles are created that are not decomposable by DPT
Solution Approach 1:
The routing problem is segmented into two separate routing patterns (first and second route patterns) that are assigned to different masks. By dividing the routing into orthogonal segments (horizontal and vertical), the method enables routing jogs while maintaining DPT decomposability through the even cycle structure.
Solution Approach 2:
The invention introduces a new dimension to routing by implementing stitching between different route patterns. Routes can transition from one pattern to another through vertically or horizontally oriented stitching segments, enabling complex routing paths with jogs while maintaining decomposability through the two-mask DPT approach.
2Productivity
If additional route patterns are added to enable jogging function, then routing efficiency improves, but device complexity increases due to need for stitch-aware routing tools
Solution Approach 1:
The first and second route patterns serve multiple functions: they provide the jogging capability, maintain DPT decomposability, and enable stitching without requiring special stitch-aware tools. The orthogonal orientation of the two patterns allows them to work together universally for various routing scenarios.
Solution Approach 2:
The routing patterns are pre-configured with orthogonal orientations and stitching capabilities before the actual routing process. This preliminary structuring allows standard routing tools to handle the jogged routes without requiring complex stitch-aware functionality, as the decomposability is built into the pattern structure itself.
3Area of stationary object
If routing zones are designated within filler cells, then chip area utilization improves, but manufacturing precision requirements increase to maintain critical distances
Solution Approach 1:
Filler cells are transformed into routing zones with specific local qualities: they are designated to accept routes while maintaining critical distances from cell boundaries. This local modification allows efficient use of previously wasted filler cell areas without compromising the global DPT decomposability or manufacturing precision.
Data Source
AI summary
A method for enabling jogging functionality in circuit designs utilizing DPT without the need for difficult to implement tools such as stitch-aware routing tools is disclosed. Embodiments include: displaying a user interface for generating an IC having a plurality of masks for a single layer; causing, at least in part, a presentation in the user interface of a cell placement of the IC that includes a filler cell; and designating a portion of the filler cell as a routing zone, the routing zone being configured such that routes placed in the routing zone are decomposable with other routes placed outside the filler cell.