Integrated Circuit Well Layout for Compact Latchup Protection

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Solution Overview

Problem

As integrated circuits shrink in size and transistors become closer together, latchup issues arise, and traditional tap cells used to prevent latchup increase the overall size of the IC, necessitating a more compact and effective design.

Innovation Solution

The design incorporates a first well with varying implant widths and extensions through adjacent standard cells, enhancing compressive strain and driving current capability while reducing physical size by continuously extending implant and active regions through the edges of the IC structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional tap cells are used to prevent latchup, then latchup protection is improved, but the overall size of the integrated circuit increases

Engineering Contradiction:
Improvelatchup protectionVSAvoidintegrated circuit size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent merges the latchup protection function with the existing well structure by extending the first well into adjacent standard cells. This integration eliminates the need for separate tap cells while maintaining latchup protection, thereby reducing overall IC size without compromising reliability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The extended first well serves multiple functions: it provides latchup protection, maintains electrical characteristics, and integrates with adjacent standard cells. This multi-functionality allows a single structure to accomplish what traditionally required separate dedicated components, reducing total area

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Power

If the first well is continuously extended through adjacent standard cells, then driving current capability is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvedriving current capabilityVSAvoidwell structure complexity
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The patent segments the well extension into distinct portions: a first portion within the tap cell and a second portion extending into adjacent standard cells. This segmentation allows the complex extended structure to be designed and manufactured in manageable sections, reducing manufacturing complexity while maintaining the continuous extension needed for high driving current

Inventive Principle:
Principle #1Segmentation

3Area of stationary object

If smaller line widths are used to reduce IC size, then area is reduced, but latchup issues increase

Engineering Contradiction:
Improveintegrated circuit sizeVSAvoidlatchup resistance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent applies local quality by creating a specifically doped first well region with particular electrical characteristics in strategic locations (extending into adjacent standard cells). This localized modification provides enhanced latchup resistance in critical areas without requiring uniform changes across the entire IC, allowing small geometry to maintain reliability

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved driving current capability and reduced physical size, achieving similar performance to larger designs while occupying 60% less area, with SiGe channels providing 30% to 50% more current than Si channels and minimizing ion degradation.

Implementation Method 1

enhancing compressive strain and driving current capability

Methodology Applied
Scientific EffectCompressive strain:

Data Source

PatentUS20230282639A1Integrated circuit structure and method of forming the same
Publication Date: 2023.09.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20230282639A1 patent drawing
  • US20230282639A1 patent drawing
  • US20230282639A1 patent drawing

AI summary

A method of forming an integrated circuit structure includes generating a first well layout pattern corresponding to fabricating a first well in the integrated circuit structure. The generating the first well layout pattern includes generating a first layout pattern having a first width, and corresponding to fabricating a first portion of the first well, and generating a second layout pattern having a second width and corresponding to fabricating a second portion of the first well. The method further includes generating a first implant layout pattern having a third width and corresponding to fabricating a first set of implants in the first portion of the first well, generating a second implant layout pattern having a fourth width and corresponding to fabricating a second set of implants in the second portion of the first well, and manufacturing the integrated circuit structure based on the above layout patterns.