Idle Sensor Correlation Analysis for Substrate Processing Tools
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Solution Overview
Problem
Existing technologies struggle to analyze the relationship between sensor values in substrate processing apparatuses when no process is being executed, limiting the ability to assess the apparatus's state during idle periods.
Innovation Solution
An information processing apparatus that acquires and displays the correlation between first and second sensor values measured outside the process execution period, enabling analysis of the substrate processing apparatus's state when no process is ongoing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensor data is only analyzed during process execution, then process monitoring capability is improved, but the ability to assess apparatus state during idle periods deteriorates
Solution Approach 1:
The patent segments the analysis period into two distinct parts: process execution periods and idle periods. By separating these time segments and applying different analysis methods to each, the system can maintain specialized monitoring during processes while also capturing idle state information that would otherwise be lost.
Solution Approach 2:
The patent performs preliminary analysis of sensor data during idle periods before processes begin. This allows the system to establish baseline correlations and detect potential issues early, preparing information that complements the main process monitoring activity.
2Reliability
If correlation analysis is performed on sensor data from idle periods, then apparatus state assessment capability is improved, but system complexity increases
Solution Approach 1:
The patent extracts only the necessary correlation information from idle period sensor data, rather than performing comprehensive analysis on all available data. This selective extraction approach maintains reliability by focusing on key relationships while reducing overall processing complexity.
Solution Approach 2:
The system creates simplified representations (correlation graphs) of the complex sensor data relationships during idle periods. These graphical copies provide intuitive state assessment without requiring the full complexity of the original multi-sensor data processing.
Data Source
AI summary
An information processing apparatus includes: an acquisition unit that acquires sensor data including a first sensor value and a second sensor value measured in a substrate processing apparatus when the substrate processing apparatus is not executing a process; and a display unit that displays information representing a correlation between the first sensor value and the second sensor value.