IDT Acoustic Wave Layout for Lower Return Loss

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Solution Overview

Problem

Existing acoustic wave devices face challenges in reducing return loss, which affects their performance in filter applications.

Innovation Solution

The design incorporates a piezoelectric substrate with an IDT electrode and reflectors, featuring distinct acoustic velocities and metallization ratios in different regions, along with cavities and mass addition films to create low and high acoustic velocity regions, preventing transverse modes and reducing return loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If acoustic velocity is made uniform across the device, then manufacturing is simplified, but transverse modes cannot be suppressed and return loss increases

Engineering Contradiction:
Improveacoustic velocity uniformityVSAvoidreturn loss
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies local quality by creating distinct acoustic velocity regions: a central region with first acoustic velocity and edge regions with second acoustic velocity (different from the first). This local differentiation suppresses transverse modes while maintaining overall device functionality, resolving the contradiction between manufacturing simplicity and return loss performance.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent segments the acoustic wave propagation path into distinct regions with different acoustic velocities. By dividing the device into a central region and edge regions with different acoustic characteristics, it prevents transverse mode coupling while maintaining controllable manufacturing processes for each segment.

Inventive Principle:
Principle #1Segmentation

2Reliability

If complex acoustic velocity control is implemented, then return loss is reduced, but device complexity increases

Engineering Contradiction:
Improvereturn lossVSAvoidacoustic velocity control structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements local quality through localized acoustic velocity control in specific regions (central vs. edge regions) rather than complex global control. This approach reduces return loss by suppressing transverse modes while maintaining relatively simple device architecture, as each region can be controlled independently with straightforward structures.

Inventive Principle:
Principle #3Local quality

3Reliability

If cavities are added to control acoustic velocity, then transverse modes are suppressed, but manufacturing complexity increases

Engineering Contradiction:
Improvetransverse mode suppressionVSAvoidcavity structure fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent utilizes cavity structures within the acoustic wave device to create regions with different acoustic velocities. These cavities function similarly to porous material approaches by modifying the effective acoustic properties of specific regions, enabling transverse mode suppression while using established fabrication techniques for creating cavity patterns.

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces return loss and insertion loss, enhancing the performance of acoustic wave devices in filter applications by confining energy within the central region and preventing mode coupling between cavity regions.

Implementation Method 1

an acoustic wave device includes a piezoelectric substrate, an IDT electrode on the piezoelectric substrate

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20240356523A1Acoustic wave device
Publication Date: 2024.10.24 MURATA MFG CO LTD
  • US20240356523A1 patent drawing
  • US20240356523A1 patent drawing
  • US20240356523A1 patent drawing

AI summary

In an acoustic wave device, a region where first and second electrode fingers overlap each other is an intersection region including a central region and edge regions facing each other and interposing the central region in a first direction. Each of busbars in the IDT electrode includes reflector busbars in reflector cavities along the second direction. Va≠Vb when an acoustic velocity in the central region is Va and an acoustic velocity in a first cavity containing region is Vb, in a portion where the IDT electrode is provided. Vc≠Vd when an acoustic velocity in the extended central region is Vc and an acoustic velocity in third and fourth cavity containing regions is Vd, in a portion where each of the reflectors is provided. (Vb/Va)≠(Vd/Vc) in the portion where the IDT electrode is provided and in a portion where at least one reflector is provided.