IGBT Diode Voltage Management via Doping Optimization

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Solution Overview

Problem

Conventional IGBT modules experience increased loss due to avalanche current flow when the reverse withstand voltage of the IGBT is lower than the forward recovery voltage, leading to junction breakdown and high p-type emitter layer and n-type buffer layer steepness limitations.

Innovation Solution

The IGBT and diode are structured with specific doping concentrations and regions to ensure the forward recovery voltage is less than the reverse withstand voltage, using floating-zone-grown silicon crystals and ion implantation techniques, with additional n-type interposing layers to enhance reverse withstand voltage and reduce forward recovery voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the reverse withstand voltage of the IGBT is made lower than the forward recovery voltage, then the device can operate in certain conditions, but avalanche current flows causing increased loss and potential breakdown

Engineering Contradiction:
Improvereverse withstand voltageVSAvoidavalanche current loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies parameter changes by optimizing the doping concentration of the n-type buffer layer and the thickness of the p-type emitter layer to achieve the desired voltage relationship (Vf < Vbr) while preventing avalanche current flow and reducing energy loss

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If ion implantation is used to form the n-type buffer layer and p-type emitter layer, then the manufacturing process is established, but the junction steepness is limited causing reverse withstand voltage to be low

Engineering Contradiction:
Improveion implantation processVSAvoidjunction steepness
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent changes the parameters of ion implantation including doping concentration, implantation energy, and layer thickness to achieve both ease of manufacture and improved junction steepness, thereby increasing reverse withstand voltage

Inventive Principle:
Principle #35Parameter changes

3Loss of energy

If the p-type emitter layer is made thin to suppress hole injection and reduce turn-off loss, then switching loss is reduced, but the reverse withstand voltage capability is compromised

Engineering Contradiction:
Improveturn-off lossVSAvoidreverse withstand voltage
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent optimizes the thickness parameter of the p-type emitter layer and compensates by adjusting the n-type buffer layer doping concentration, achieving both reduced turn-off loss through thin emitter layer and maintained reverse withstand voltage through buffer layer optimization

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration prevents avalanche current flow, achieving low-cost and low-loss semiconductor devices with improved reverse withstand and forward recovery voltage management.

Implementation Method 1

an n-type buffer layer 7 is formed by performing ion implantation on the other surface portion of the FZ crystal substrate, a p-type emitter layer 8 is formed by ion-implanting lightly

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS7602045B2Semiconductor device and inverter device using the same
Publication Date: 2009.10.13 RENESAS ELECTRONICS CORP
  • US7602045B2 patent drawing
  • US7602045B2 patent drawing
  • US7602045B2 patent drawing

AI summary

In a semiconductor device having a pair of IGBT and diode which are connected to each other in inverse-parallel in which a collector-electrode of the IGBT and a cathode-electrode of the diode are wired to each other, and an emitter-electrode of the IGBT and an anode-electrode of the diode are wired to each other, when a breakdown voltage of a junction of a p-type emitter layer and an n-type buffer layer of the IGBT is represented as BVec, and a forward voltage occurring while the diode transits from a state of blocking to a state of forward conduction is represented as VF, a relationship of VF&lt;BVec is satisfied in a predetermined current value Id of a current flowing in the diode, and the maximal doping concentration of the n-type cathode layer of the diode is higher than that of the n-type buffer layer of the IGBT.