IGZO Array Substrate Light Shielding via Color Resist
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Solution Overview
Problem
In top-gate indium gallium zinc oxide (IGZO) semiconductor array substrates, the active island is easily irradiated by light during subsequent processes, affecting the channel region of thin film transistor (TFT) devices and impacting their performance.
Innovation Solution
An array substrate design that includes a color resist layer and a light blocking layer, where the color resist layer forms a block in the display area and the light blocking layer is positioned above the active island, with via holes allowing electrical connection while preventing light from reaching the channel region, thereby shielding it from light exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the active island is processed with light for subsequent processes, then the subsequent processing can be completed, but the channel region of the active island is seriously affected by light irradiation, resulting in large impact on TFT device performance
Solution Approach 1:
A light blocking layer is introduced as an intermediary component between the active island and the light source. This layer selectively blocks light from reaching the channel region while allowing subsequent light-based processing to proceed elsewhere on the substrate, thus mediating between the need for light processing and the need to protect the sensitive channel region
Solution Approach 2:
The light blocking layer is segmented into specific regions, with light blocking portions positioned over the channel region and non-light blocking portions in other areas. This segmentation allows different parts of the substrate to receive different light treatment, enabling subsequent processing in non-sensitive areas while protecting the channel region
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents light from affecting the channel region of the active island, enhancing the stability and performance of TFT devices by blocking light in subsequent processes and lighting tests.
Implementation Method 1
a light blocking layer located above the active island, with via holes allowing electrical connection while preventing light from reaching the channel region, thereby shielding it from light exposure
Data Source
AI summary
An array substrate and a method of manufacturing the same are provided. The array substrate includes an active island and a gate insulating layer, a gate, and an interlayer dielectric layer stacked on the active island. A color resist layer is disposed on the interlayer dielectric layer, and an orthographic projection of the color resist layer on a base substrate covers an orthographic projection of a channel region of the active island on the base substrate.