IGZO Array Substrate With UV-to-Visible Anti-Radiation Layer

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Solution Overview

Problem

Indium gallium zinc oxide (IGZO) in thin film transistor arrays experiences poor light stability due to generation of electron-hole pairs and oxygen vacancies from high energy photons, leading to negative drift in threshold voltages.

Innovation Solution

An array substrate with an anti-radiation layer that converts high energy light waves, such as ultraviolet light, into visible light, preventing these high energy rays from reaching the oxide semiconductor layer and reducing the risk of electron-hole pair generation and oxygen vacancies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If IGZO is used in TFT backboards to achieve high mobility, then device performance is improved, but light stability deteriorates due to negative drift in threshold voltages caused by high energy photons

Engineering Contradiction:
Improvecarrier mobilityVSAvoidlight stability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent introduces an anti-radiation layer as an intermediary component between the external environment and the IGZO-based TFT array. This layer contains down-conversion materials that mediate the interaction between high energy photons and the IGZO semiconductor, converting harmful UV radiation into harmless visible light before it reaches the sensitive IGZO layer, thereby protecting the device while maintaining its high mobility performance

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent converts the harmful high energy UV photons into beneficial visible light through down-conversion materials in the anti-radiation layer. This transformation process takes the harmful radiation that causes threshold voltage drift and converts it into useful visible light that does not damage the IGZO semiconductor, effectively turning a harmful factor into a beneficial one

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If anti-radiation layer is added to protect oxide semiconductor layer from high energy photons, then light stability is improved, but device complexity increases

Engineering Contradiction:
Improvelight stabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The anti-radiation layer is designed with multi-functionality: it serves as both a protective layer against UV radiation and as a down-conversion layer that transforms UV light into visible light. By combining multiple functions into a single layer, the patent reduces the need for additional separate components, thereby limiting the increase in device complexity while achieving improved light stability

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The anti-radiation layer employs composite materials containing down-conversion materials embedded in a matrix material. This composite structure allows the layer to simultaneously provide UV protection and visible light transmission in a single integrated component, avoiding the need for multiple separate layers and thus minimizing the increase in structural complexity

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The anti-radiation layer effectively improves the light stability of the oxide semiconductor layer by absorbing and converting high energy light waves, preventing damage and extending the lifespan of the array substrate.

Implementation Method 1

the anti-radiation layer is configured to convert the high energy light waves into visible light

Methodology Applied
Scientific EffectDown-conversion: Photoluminescence

Implementation Method 2

the anti-radiation layer is configured to allow high energy light waves to enter the anti-radiation layer, the anti-radiation layer is configured to convert the high energy light waves into visible light

Methodology Applied
Scientific EffectAbsorption of electromagnetic radiation: Absorption (EM radiation)

Data Source

PatentUS11830881B2Array substrate, manufacturing method thereof, and display panel
Publication Date: 2023.11.28 SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
  • US11830881B2 patent drawing
  • US11830881B2 patent drawing
  • US11830881B2 patent drawing

AI summary

An array substrate, a manufacturing method thereof, and a display panel are provided. The array substrate includes at least one anti-radiation layer including a light incident side and a light-emitting side. The light-emitting side is positioned adjacent to an oxide semiconductor layer, the light incident side is configured to allow high energy light waves to enter the anti-radiation layer, the anti-radiation layer is configured to convert the high energy light waves into visible light, and the light-emitting side is configured to allow the visible light to enter the oxide semiconductor layer, thereby improving light stability of oxide semiconductors.