IHS Boiling Enhancement Mesh for Low-Resistance Immersion Cooling

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Solution Overview

Problem

Existing semiconductor chip packaging structures for immersion cooling systems face inefficiencies in heat transfer due to multiple thermal interface layers and additional components, which increase thermal resistance and complexity.

Innovation Solution

A simplified structure with a direct attachment of thin copper or metal meshing to the integrated heat spreader (IHS) of the semiconductor chip package, promoting bubble nucleation and reducing thermal resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple thermal interface layers and additional components are used in semiconductor chip packaging structures, then the structure can accommodate various components and interfaces, but thermal resistance increases and heat transfer efficiency decreases

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidnumber of thermal interface layers and components
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent removes multiple thermal interface layers and intermediate components from the heat transfer path between the semiconductor chip and the heat sink. By extracting these unnecessary layers, the invention achieves direct thermal contact, significantly reducing thermal resistance and improving heat transfer efficiency while simplifying the overall structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention merges the thermal interface function directly into the heat sink structure itself, eliminating the need for separate thermal interface layers. The heat sink is designed to make direct contact with the semiconductor chip, combining the heat dissipation and thermal conduction functions into a single integrated component.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If traditional immersion cooling structures are used, then cooling coverage is provided, but thermal resistance remains high and cooling capability is limited

Engineering Contradiction:
Improvecooling capabilityVSAvoidthermal resistance
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent utilizes phase transition of the immersion cooling fluid (boiling and condensation) to enhance heat transfer. The heat sink structure promotes bubble nucleation and phase change at the liquid-vapor interface, leveraging the high latent heat of vaporization to dramatically increase cooling capability and reduce thermal resistance compared to single-phase liquid cooling.

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The invention transitions from single-phase liquid cooling to two-phase cooling by utilizing the vapor phase in addition to the liquid phase. This dimensional change in the cooling medium's state allows for much higher heat flux and improved thermal management performance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves lower thermal resistance (as low as 0.042 C°/W) and higher cooling capability compared to prior art, while also reducing complexity and cost.

Implementation Method 1

promoting bubble nucleation

Methodology Applied
Scientific EffectBubble nucleation: Nucleation

Implementation Method 2

the liquid in the thermal bath 102 boils and converts from a liquid to a vapor

Methodology Applied
Scientific EffectBoiling: Boiling

Implementation Method 3

The boiling activity corresponds to a phase transition in the liquid (from liquid to gas)

Methodology Applied
Scientific EffectPhase transition: Phase Change

Implementation Method 4

heat from the operating semiconductor chips is transferred from the electronic system to the immersion bath

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12293956B2Boiling enhancement structures for immersion cooled electronic systems
Publication Date: 2025.05.06 INTEL CORP
  • US12293956B2 patent drawing
  • US12293956B2 patent drawing
  • US12293956B2 patent drawing

AI summary

An apparatus is described. The apparatus includes a packaged semiconductor device. The packaged semiconductor device having an integrated heat spreader, wherein, a boiling enhancement structure exists on the integrated heat spreader without a block mass residing between the boiling enhancement structure and the integrated heat spreader. The boiling enhancement structure has a structured non-planar surface to promote bubble nucleation in an immersion cooling system.