III-Nitride Antenna Diode for Surge Protection

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Solution Overview

Problem

Group III-Nitride diodes with low on-resistance tend to be area-intensive, making them challenging for dimensional scaling in integrated circuits, and existing diodic protection circuits are not efficient in managing electrical surges and antenna effects.

Innovation Solution

The integration of III-N heterojunction diodes within the heterostructure of III-N transistors, both horizontally and vertically, to create a compact diode protection circuit that can effectively shunt electrical surges and antenna effects, utilizing a heterostructure with a high k dielectric and polarization layers to enhance charge carrier mobility and reduce footprint.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If III-N diodes are designed with low on-resistance, then protection effectiveness is improved, but device area increases

Engineering Contradiction:
Improveprotection effectivenessVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent combines the diode protection circuit with the transistor heterostructure by integrating shared layers including the AlGaN barrier layer, AlN polarization layer, and GaN channel layer. This merging allows the diode to achieve low on-resistance through the shared high-mobility GaN channel while reducing the overall device area by eliminating redundant structural components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The heterostructure layers serve multiple functions simultaneously: the AlGaN barrier layer provides both transistor gate isolation and diode Schottky barrier formation, the AlN polarization layer enables both transistor channel formation and diode charge carrier generation, and the GaN channel layer provides high-mobility conduction for both device types. This multi-functionality reduces total device area while maintaining low diode on-resistance.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If dimensional scaling is implemented, then integration density is improved, but diode protection performance deteriorates

Engineering Contradiction:
Improveintegration densityVSAvoiddiode protection performance
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent transitions from planar two-dimensional scaling to three-dimensional vertical integration by stacking multiple functional layers vertically. The heterostructure utilizes the vertical dimension with alternating layers of different materials (AlGaN, AlN, GaN) to achieve both compact footprint for high integration density and sufficient vertical conduction paths to maintain low on-resistance and effective protection performance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes material parameters by using III-Nitride semiconductors with wide bandgap and high carrier mobility properties. The specific layer thicknesses and composition ratios are optimized to maintain appropriate resistance and breakdown characteristics even as the overall device dimensions are reduced for scaling, thereby preserving protection performance while achieving higher integration density.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient protection against electrical surges and antenna effects while minimizing the IC footprint, allowing for dimensional scaling and integration in various electronic devices such as smartphones and System-on-Chip platforms.

Implementation Method 1

a heterostructure with a high k dielectric and polarization layers to enhance charge carrier mobility

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

effectively shunt electrical surges and antenna effects

Methodology Applied
Scientific EffectElectrical Conduction: Conduction (electrical)

Data Source

PatentUS11373995B2Group III-nitride antenna diode
Publication Date: 2022.06.28 INTEL CORP
  • US11373995B2 patent drawing
  • US11373995B2 patent drawing
  • US11373995B2 patent drawing

AI summary

A Group III-Nitride (III-N) device structure is presented comprising: a heterostructure having three or more layers comprising III-N material, a cathode comprising donor dopants, wherein the cathode is on a first layer of the heterostructure,an anode within a recess that extends through two or more of the layers of the heterostructure, wherein the anode comprises a first region wherein the anode is separated from the heterostructure by a high k dielectric material, and a second region wherein the anode is in direct contact with the heterostructure, and a conducting region in the first layer in direct contact to the cathode and conductively connected to the anode. Other embodiments are also disclosed and claimed.