III-V MOSFET Source-Channel Junction Barrier Layer

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Solution Overview

Problem

III-V metal-oxide-semiconductor field effect transistors (MOSFETs) face performance reduction due to an electron energy barrier in the source-to-channel junction, causing current choke and increased resistance.

Innovation Solution

Incorporating a barrier layer within the source-to-channel junction of III-V MOSFETs, where the current flows through the barrier layer, smoothing the electron energy barrier and reducing source/drain resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional source-to-channel junction is used in III-V MOSFETs, then the device structure is simple, but an electron energy barrier forms causing current choke and increased resistance

Engineering Contradiction:
Improvecurrent flow performanceVSAvoidjunction structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A barrier layer is introduced as an intermediary component between the source and channel regions. This barrier layer has a higher conduction band edge than both the source and channel regions, creating a triangular potential barrier that controls electron flow. The barrier layer mediates the electron transport by providing a controlled energy barrier that prevents excessive carrier injection while maintaining low resistance, thus resolving the contradiction between simple structure and good current flow performance.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The conduction band energy parameter is changed by introducing a barrier layer with a higher conduction band edge (EC) than the source and channel regions. The barrier height is controlled by the difference in conduction band edges, creating a triangular potential barrier with width Wb. This parameter change transforms the junction characteristics from a simple interface to a controlled energy barrier structure, improving current flow performance while managing the complexity through precise parameter control.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the electron energy barrier is reduced to improve current flow, then resistance decreases, but control over carrier injection is lost

Engineering Contradiction:
Improvesource/drain resistanceVSAvoidcarrier injection control
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The barrier layer serves as a mediator that provides both low resistance and controlled carrier injection. By positioning the barrier layer between the source and channel with a specific conduction band offset, it creates a triangular potential barrier that allows controlled electron injection into the channel while maintaining low series resistance. The gate voltage controls the barrier height, providing ease of operation for carrier injection control.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The barrier layer creates a dynamic potential barrier that can be modulated by gate voltage. The triangular potential barrier width and height are controlled by the applied gate voltage, allowing dynamic control over carrier injection. This dynamic characteristic enables the device to switch between high and low resistance states, providing both low resistance when on and controlled injection through voltage modulation.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the performance of III-V MOSFETs by reducing resistance and enhancing current flow between the source and channel areas, thereby improving overall transistor performance.

Implementation Method 1

The barrier layer within a source-to-channel junction may smooth the electron energy barrier in a source-to-channel junction of an III-V MOSFET

Methodology Applied
Scientific EffectElectron energy barrier smoothing:

Data Source

PatentUS11335796B2Source to channel junction for III-V metal-oxide-semiconductor field effect transistors (MOSFETs)
Publication Date: 2022.05.17 INTEL CORP
  • US11335796B2 patent drawing
  • US11335796B2 patent drawing
  • US11335796B2 patent drawing

AI summary

Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device including a substrate, and a channel area above the substrate and including a first III-V material. A source area may be above the substrate and including a second III-V material. An interface between the channel area and the source area may include the first III-V material. The source area may include a barrier layer of a third III-V material above the substrate. A current is to flow between the source area and the channel area through the barrier layer. Other embodiments may be described and/or claimed.