Film Forming Equipment With Illuminance-Guided Curing Motion
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Solution Overview
Problem
Existing film forming technologies face challenges in achieving uniform illuminance distribution during the curing process of curable compositions, leading to uneven planarization on substrates.
Innovation Solution
A film forming apparatus with a holding unit, light irradiation unit, drive unit, and control unit that adjusts the relative position and timing of light irradiation based on measured illuminance distribution to ensure uniform curing of the curable composition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a light source is used to cure the composition, then the composition can be cured and planarization can be achieved, but the illuminance distribution becomes uneven leading to insufficient planarization
Solution Approach 1:
The patent applies local quality by making different regions of the optical element have different optical properties. Specifically, the reflectance or diffusion characteristics are locally adjusted in different regions of the optical element to compensate for the non-uniform illuminance distribution from the light source, ensuring uniform curing across the entire composition area
Solution Approach 2:
The patent changes optical parameters of the optical element to resolve the illuminance uniformity issue. By adjusting the reflectance or diffusion angle in different regions of the optical element, the patent transforms the non-uniform light distribution into a uniform one, enabling accurate planarization
2Manufacturing precision
If the illuminance distribution is made uniform by shaping the light emitted from the light source, then the planarization performance can be improved, but the illuminance distribution is not necessarily made uniform
Solution Approach 1:
The patent employs feedback by measuring the actual illuminance distribution and using this information to determine the optimal motion profile. The system adjusts the relative motion between the substrate and light source based on the measured illuminance data, ensuring that areas with lower illuminance receive light for longer durations to achieve uniform curing
3Illumination intensity
If the relative position between the holding unit and light irradiation unit is changed, then the illuminance distribution can be optimized, but the curing process becomes more complex
Solution Approach 1:
The patent applies dynamics by making the relative position between the holding unit and light irradiation unit variable during the curing process. Instead of using a complex multi-element optical system, the patent uses simple relative motion to redistribute the light exposure, optimizing illuminance distribution while maintaining process simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces illuminance unevenness, improving the planarization accuracy and uniformity of the formed film on substrates.
Implementation Method 1
a light irradiation unit configured to irradiate light that cures the curable composition
Data Source
AI summary
A film forming apparatus configured to form a film of a curable composition on a substrate. The film forming apparatus comprises a holding unit configured to hold the substrate, a light irradiation unit configured to irradiate light that cures the curable composition, a drive unit configured to drive so as to change a relative position between the holding unit and the light irradiation unit, and a control unit configured to control driving of the drive unit and timing at which the light irradiation unit irradiates the light based on an illuminance distribution of the light in a region in which the light is irradiated by the light irradiation unit.