Illumination Optical System Aperture Offset Adjustment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional exposure apparatuses face a decrease in exposure amount due to image blur and position shifts caused by optical aberration, leading to non-uniform illuminance and inefficient exposure processes.
Innovation Solution
An illumination optical system that calculates and adjusts the aperture size of the illumination field stop based on the target illumination range, using a calculation unit and adjusting unit to compensate for aberration-induced image forming position shifts, ensuring consistent exposure across the target area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the illumination field stop is widened in the opening direction by a predetermined offset amount, then the exposure amount near the light shielding portion is prevented from decreasing, but the image blur amount increases or the image forming position shifts depending on the illumination range
Solution Approach 1:
The patent applies dynamics by making the offset amount adjustable based on the illumination range. Instead of using a fixed predetermined offset amount, the system dynamically changes the offset amount according to the selected illumination range, thereby preventing image blur and position shifts while maintaining adequate exposure amount.
Solution Approach 2:
The patent changes the parameter of offset amount based on the illumination range. By adjusting the offset amount parameter according to different illumination ranges, the system optimizes both the exposure amount and image forming position accuracy for each specific range, resolving the contradiction between these two requirements.
2Adaptability or versatility
If the illumination range is changed to perform exposure, then the exposure process becomes flexible, but the offset amount becomes short causing image blur in the predetermined illumination range
Solution Approach 1:
The system dynamically adjusts the offset amount according to the illumination range selection. When the illumination range changes, the offset amount is automatically updated to maintain optimal values, ensuring image sharpness is preserved across different illumination ranges while maintaining flexibility.
Solution Approach 2:
The system implements feedback by monitoring the illumination range and automatically adjusting the offset amount accordingly. This closed-loop control ensures that when the illumination range changes, the offset amount is corrected to prevent image blur, maintaining image sharpness across all illumination ranges.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution maintains a consistent exposure amount by dynamically adjusting the aperture size according to the target illumination range, preventing image blur and ensuring uniform illuminance, thereby enhancing the exposure process efficiency.
Implementation Method 1
an imaging optical system configured to form an image of an aperture of the stop onto the surface to be illuminated
Data Source
AI summary
An illumination optical system includes: a stop configured to define an illumination range of a surface to be illuminated; an imaging optical system configured to form an image of an aperture of the stop onto the surface to be illuminated; an calculation unit configured to calculate an offset amount between a size of the aperture and a target illumination range of the surface to be illuminated using data on the target illumination range; and an adjusting unit configured to adjust the size of the aperture based on the calculated offset amount. The offset amount differs according to a size of the target illumination range.