Illumination Parameter Prediction Model Calibration

The patent segments the correction terms into two distinct categories: constant correction terms (valid for all illumination settings) and dynamic correction terms (specific to each illumination setting). This segmentation allows the calibration process to focus measurements only on determining these correction terms rather than measuring all illumination parameters across all settings, thereby reducing measurement time while maintaining prediction accuracy.

The patent performs preliminary calibration by determining constant correction terms once during initial setup, which can then be reused for all subsequent illumination settings. This preliminary action eliminates the need to repeatedly measure and calibrate the same geometric deviations for each new illumination setting, significantly reducing ongoing calibration time while preserving accuracy.

The constant correction terms serve a universal function across all illumination settings, capturing geometric deviations that affect all settings equally. By determining these terms once and applying them universally, the system achieves broad adaptability without requiring separate calibration for each illumination setting, thus maintaining productivity.

The patent applies partial action by determining correction terms for only a subset of illumination parameters (constant terms applicable to all settings and dynamic terms for specific settings) rather than measuring all parameters for all settings. This partial calibration approach provides sufficient adaptability for practical use while avoiding the excessive measurement time that would result from comprehensive calibration.

The patent introduces dynamic correction terms that specifically account for time-varying variations in the radiation source and other dynamic conditions. These correction terms can be updated periodically or when significant changes occur, allowing the model to adapt to dynamic conditions without requiring continuous recalibration, thus maintaining reliability while minimizing time loss.

The patent implements periodic recalibration to update dynamic correction terms at scheduled intervals or when triggered by specific conditions (e.g., source replacement, significant performance drift). This periodic approach maintains prediction reliability under dynamic conditions while avoiding excessive recalibration that would reduce operational efficiency.