Image Data Storage for IC Inspection Recipe Tuning
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Solution Overview
Problem
Existing integrated circuit inspection systems face challenges with flexibility, reliability, and cost due to reliance on customized hardware and switched fabric topologies, which are inflexible, costly, and lack standardization.
Innovation Solution
A system utilizing a sensor array to generate image data, processed by commercially available nodes connected via networks like fiber optic and gigabit Ethernet, allowing for flexible algorithm implementation and efficient data storage and analysis, with a RAID storage node for data redundancy and accessibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If customized hardware is used for inspection systems, then measurement precision and speed can be optimized, but device complexity and cost increase significantly
Solution Approach 1:
The patent uses commercially available computer hardware (copies of standard components) instead of custom-designed hardware. The system achieves defect detection precision through software algorithms running on standard processors, memory, and storage components, eliminating the need for specialized custom hardware design while maintaining measurement accuracy.
Solution Approach 2:
The patent replaces the mechanical/customized hardware system with a software-based processing system running on commercial off-the-shelf computers. The defect detection functionality is implemented through programmable software rather than fixed custom hardware circuits, allowing the same hardware platform to be used across multiple applications.
2Productivity
If customized hardware is used for inspection systems, then processing speed can be optimized, but reliability decreases due to smaller engineering support base
Solution Approach 1:
The patent employs universal commercially available computer hardware that can perform multiple functions including defect detection, image processing, data storage, and analysis. These standard components benefit from extensive engineering support, bug fixes, and optimizations from major manufacturers, thereby improving system reliability while maintaining high processing speeds through software optimization.
3Adaptability or versatility
If switched fabric topology is used for system architecture, then data communication flexibility is achieved, but system cost and complexity increase
Solution Approach 1:
The patent segments the inspection system into independent commercial computer nodes (processing nodes, storage nodes, control nodes) that communicate through standard network interfaces. Each node operates independently using standard communication protocols, achieving system flexibility without requiring a complex custom switched fabric architecture.
Solution Approach 2:
The patent introduces standard network communication protocols and interfaces as intermediaries between system components. These standard intermediaries enable flexible data communication between processing nodes, storage nodes, and control elements without requiring direct custom hardware connections, thereby reducing architectural complexity while maintaining adaptability.
4Measurement precision
If customized hardware is used for inspection systems, then specific algorithm optimization is achieved, but development time and cost increase
Solution Approach 1:
The patent uses dynamically programmable software algorithms running on standard hardware platforms. This allows rapid adaptation and optimization of defect detection algorithms without requiring time-consuming custom hardware redesign. The software can be modified, updated, and optimized much faster than custom hardware development cycles.
Data Source
AI summary
A system having a sensor array adapted to provide image data. A process node is connected to the sensor array, and analyzes portions of the image data. A job manager is connected to the process node, and instructs the process node to send the portions of the image data to a storage node. The storage node receives and stores the sent portions of the image data. In this manner, image data can be stored and run multiple times in order to tune a recipe for the analysis system. Because the same image data can be used over and over again, the recipe creating process can be more finely tuned to detect both the types of defects and at a level that is desired.