Image Processing Apparatus Rotation Gap Correction
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Solution Overview
Problem
The increasing complexity of semiconductor pattern shapes and discrepancies between SEM images and design data lead to decreased accuracy in pattern evaluation, particularly in detecting slight rotations caused by electrification or other factors.
Innovation Solution
An image processing apparatus that indirectly corrects the rotation gap between measurement and reference image data using wide-angle image data, enabling high-accuracy detection and correction by matching and adjusting image data through multiple units such as first and second rotation angle detecting units, magnification adjusting units, and rotation calculating units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If direct matching between measurement image data and reference image data is performed, then the process is simple, but the rotation detection accuracy decreases when there is a discrepancy between pattern shapes
Solution Approach 1:
The patent introduces wide-angle image data as an intermediary between measurement image data and reference image data. Instead of directly comparing measurement images with reference data, the system first matches wide-angle images with reference data to obtain transformation parameters, then applies these parameters to correct measurement images. This intermediary approach enables accurate rotation detection even when pattern shapes differ, as the wide-angle images provide a broader contextual framework for alignment.
2Measurement precision
If conventional rotation correction is applied, then slight rotation can be detected when pattern shapes are similar, but accuracy decreases when there is a discrepancy between SEM image and design data shapes
Solution Approach 1:
The wide-angle image data serves as an adaptable intermediary that can accommodate shape discrepancies between measurement and reference data. By establishing the transformation relationship through wide-angle images first, the system creates a flexible framework that can handle various pattern shape variations while maintaining rotation detection accuracy across different semiconductor fabrication processes and design iterations.
Data Source
AI summary
It is an object of the present invention is to provide an image processing technique that can detect the rotation of an observation image of a specimen with high accuracy. An image processing apparatus according to the present invention indirectly corrects a rotation gap between measurement image data and reference image data through wide-angle image data including a measurement part of a specimen (FIG. 1).