Image Sensor Address Markers for Pixel Inspection
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Solution Overview
Problem
Inspecting defects and failed pixels in image sensor fabrication requires effective position marking to facilitate quick identification, which existing technologies do not adequately address.
Innovation Solution
The implementation of both outer and inner address markers within the image sensor structure, including active, gate, metal, and micro-lens layers, to provide clear reference points for pixel positioning, with these markers being strategically placed in interspaces and aligned with specific layers for enhanced visibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If address markers are added to facilitate pixel position identification, then inspection efficiency is improved, but device complexity increases
Solution Approach 1:
The address marker system is segmented into multiple types: outer address markers positioned at periphery regions and inner address markers positioned at interspaces between pixel blocks. This segmentation allows different markers to serve different inspection needs, improving overall inspection efficiency while distributing the complexity across modular components rather than adding a single complex marker system
Solution Approach 2:
Different regions of the image sensor are assigned different types of address markers based on local inspection requirements. Outer address markers are placed at periphery regions for overall positioning, while inner address markers are placed at interspaces for detailed pixel block identification. This local differentiation optimizes inspection efficiency for each region without uniformly increasing complexity across the entire device
2Measurement precision
If multiple layers of address markers are implemented, then measurement precision is improved, but manufacturing complexity increases
Solution Approach 1:
The address markers are merged with existing sensor layers and structures. Outer address markers are formed in conjunction with periphery regions, while inner address markers are integrated into interspaces between pixel blocks. This merging approach allows address markers to be manufactured alongside standard sensor components using similar processes, reducing overall manufacturing complexity despite the multi-layer marker system
Solution Approach 2:
The address markers serve multiple functions: they provide position reference for inspection, define pixel block boundaries, and assist in alignment during manufacturing. This multi-functionality reduces the need for separate reference structures, thereby improving measurement precision without proportionally increasing manufacturing complexity
Data Source
AI summary
Provided is an image sensor having a pixel region including a plurality of pixel blocks disposed in a matrix form, outer address markers around the pixel region, interspaces between the plurality of pixel blocks, and inner address markers disposed in the interspaces.