Solid-State Image Sensor Charge Holding Depth Optimization

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Solution Overview

Problem

Existing solid-state image sensors suffer from insufficient light-shielding performance in the charge holding portion, leading to noise generation and degradation of image quality due to incident light.

Innovation Solution

A solid-state image sensor design where the charge holding portion is positioned at least 4 μm deeper than the light-receiving surface, utilizing the light absorption characteristics of silicon to absorb most incident light, and optionally incorporating a light-shielding layer or optical filter to further suppress noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the charge holding portion is positioned closer to the light-receiving surface, then the device complexity is reduced, but light-shielding performance deteriorates causing noise generation

Engineering Contradiction:
Improvestructure complexityVSAvoidnoise generation
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The patent positions the charge holding portion at a depth of not less than 4 μm from the light-receiving surface, utilizing the depth dimension to achieve light shielding. This spatial arrangement in the depth direction allows the charge holding portion to be shielded from incident light while maintaining a relatively simple overall structure without requiring additional light-shielding layers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Object-affected harmful factors

If a light-shielding layer is added to improve light-shielding performance, then noise generation is suppressed, but device complexity increases

Engineering Contradiction:
Improvelight-shielding performanceVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent changes the positional parameter of the charge holding portion, specifying that it should be located at a depth of not less than 4 μm from the light-receiving surface. This parameter change utilizes the light absorption characteristics of silicon to achieve effective light shielding without adding structural complexity.

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If the charge holding portion is positioned deeper in the substrate, then light-shielding performance is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvenoise generationVSAvoidpositioning precision
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent specifies a minimum depth parameter (not less than 4 μm) for the charge holding portion, which balances light-shielding performance with manufacturing feasibility. This parameter setting ensures sufficient light absorption while remaining achievable with conventional manufacturing precision.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively reduces noise generation and image quality degradation by ensuring that most incident light is absorbed by the substrate before reaching the charge holding portion, thereby enhancing the signal-to-noise ratio and allowing for a global shutter function with improved image quality.

Implementation Method 1

utilizing the light absorption characteristics of silicon to absorb most incident light

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

charges generated by photoelectric conversion element

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS9548328B2Solid-state image sensor and camera
Publication Date: 2017.01.17 CANON KK
  • US9548328B2 patent drawing
  • US9548328B2 patent drawing
  • US9548328B2 patent drawing

AI summary

A solid-state image sensor is provided. The sensor includes a substrate having a light-receiving surface. The substrate includes a charge accumulation portion that forms part of a photoelectric conversion element, a charge holding portion arranged at a position deeper than the charge accumulation portion from the light-receiving surface, and a first transfer portion configured to transfer charges generated by the photoelectric conversion element to the charge holding portion along a depth direction of the substrate. A distance between the charge holding portion and the light-receiving surface is not less than 4 μm.