Image Sensor Substrate Laminate With Clean Light-Shielding Layers

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Solution Overview

Problem

The formation of light-shielding films using black resin in image sensors often results in foreign matter from colorants remaining on the imaging surface, causing imaging errors such as reflection.

Innovation Solution

A method for manufacturing a substrate laminate that involves forming a patterned coating film using a first developable composition without colorants and a second developable composition with colorants, where the exposed portion includes a first semi-cured layer and a second semi-cured layer, and the layers are further cured before bonding with a semiconductor element substrate, preventing foreign matter deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If photolithography using black resin is employed to form a light-shielding film, then fine processing capability and dimension accuracy are improved, but foreign matter from colorants remains on the imaging surface causing imaging errors

Engineering Contradiction:

Improvedimension accuracyVSAvoidforeign matter deposition

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The coating film is divided into two distinct layers: a lower layer (first semi-cured layer) made of developable composition without colorant, and an upper layer (second semi-cured layer) made of developable composition with colorant. This segmentation ensures that the colorant is confined to the upper layer and does not contaminate the imaging surface, while still achieving fine processing capability through photolithography.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the coating film have different compositions and properties. The lower layer near the substrate is free of colorant to prevent contamination, while the upper layer contains colorant to provide light-shielding function. This local differentiation of material properties resolves the contradiction between fine processing and foreign matter deposition.

Inventive Principle:

Principle #3Local quality

2Object-affected harmful factors

If a light-shielding film is formed using black resin to inhibit reflected light and scattered light, then imaging quality is improved, but foreign matter from colorant causes reflection during imaging

Engineering Contradiction:

Improvereflected light and scattered lightVSAvoidreflection from foreign matter

Core Design Contradiction:

Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The harmful colorant component is extracted and removed from the lower layer that contacts the imaging surface. By placing the colorant only in the upper layer and removing the lower layer, the light-shielding function is preserved while the source of foreign matter contamination is eliminated.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The lower layer made of developable composition without colorant acts as an intermediary between the substrate and the upper layer containing colorant. This intermediary layer provides a clean interface that prevents colorant from contaminating the imaging surface while still allowing the upper layer to perform its light-shielding function.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If metal vapor deposition method is used to form a light-shielding film, then light-shielding performance is improved, but manufacturing cost increases

Engineering Contradiction:

Improvereflected light and scattered lightVSAvoidmanufacturing cost

Core Design Contradiction:

Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent uses organic photosensitive compositions (resins) instead of expensive metal materials for vapor deposition. These organic materials can be applied using conventional photolithography processes, providing a cost-effective alternative to metal-based light-shielding films while achieving sufficient light-shielding performance.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method effectively prevents the deposition of foreign matter from colorants, reducing imaging errors like reflection and flare, while maintaining the light-shielding properties of the film.

Implementation Method 1

a step Sb of forming an exposed portion in a semi-cured state and a non-exposed portion on the first substrate by irradiating the coating film with an active energy ray through a photomask

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS20250015105A1Substrate laminate, image sensor, and method for manufacturing sustrate laminate

Publication Date: 2025.01.09 KANEKA CORP

AI summary

A substrate laminate (10) includes a first substrate (11), a second substrate (12), and a cured product layer (13) interposed between the first substrate (11) and the second substrate (12). The cured product layer (13) is patterned, and includes a first layer (14) including a cured product of a first developable composition, and a second layer (15) including a cured product of a second developable composition, in this order from a first substrate (11) side. The first developable composition contains a polymerizable first curable compound and a first photopolymerization initiator and is free of a colorant. The second developable composition contains a polymerizable second curable compound, a second photopolymerization initiator, and a colorant.