3D Optoelectrical Image Sensor Simulation Crosstalk
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Solution Overview
Problem
Current three-dimensional optoelectrical simulations of image sensors face challenges in accurately predicting electrical crosstalk, particularly when pixel sizes are reduced, as existing methods degrade in prediction accuracy and require significant computational resources.
Innovation Solution
A method for improved three-dimensional optoelectrical simulation that generates a process simulation result, structure simulation result, and merged results for image sensors, including optical and electrical crosstalk simulations, with a focus on segmenting and extending these results to enhance prediction accuracy and reduce computational time and memory requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional three-dimensional optoelectrical simulation methods are used for image sensors with reduced pixel size, then the simulation can be performed, but the prediction accuracy of electrical crosstalk is degraded
Solution Approach 1:
The simulation method segments the image sensor into multiple pixel units, where electrical crosstalk is calculated for each pixel separately. This segmentation allows for more precise tracking of electrical signals and crosstalk propagation at the pixel level, improving prediction accuracy compared to conventional holistic simulation approaches.
Solution Approach 2:
The patent applies local quality by using different simulation approaches for different parts of the image sensor. Specifically, electrical crosstalk is simulated with higher precision at the pixel level while optical crosstalk is simulated at the array level, optimizing both accuracy and computational efficiency for each specific parameter.
2Measurement precision
If conventional three-dimensional optoelectrical simulation methods are used, then complete simulation results can be obtained, but running time and memory requirements increase significantly
Solution Approach 1:
By segmenting the simulation into modular steps (process simulation, structure simulation, optical crosstalk simulation, and electrical crosstalk simulation), the patent enables selective execution of simulation components. This segmentation reduces overall running time by allowing users to perform only the necessary simulations for their specific needs.
Solution Approach 2:
The patent performs process simulation and structure simulation as preliminary steps that generate reusable data for subsequent optical and electrical crosstalk simulations. This preliminary action eliminates the need to repeat computationally intensive process and structure analyses for each type of crosstalk simulation, significantly reducing total running time.
3Measurement precision
If conventional three-dimensional optoelectrical simulation methods are used, then complete simulation results can be obtained, but memory requirements increase significantly
Solution Approach 1:
The patent extracts and separates the simulation of electrical crosstalk from the optical crosstalk simulation. By taking out the electrical crosstalk calculation as a distinct step that uses segmented pixel data, the method reduces memory requirements compared to conventional methods that simulate all crosstalk types simultaneously in a unified framework.
Solution Approach 2:
The simulation data structure is segmented into separate components for process parameters, structural parameters, optical properties, and electrical properties. This segmentation allows for efficient memory management by loading and processing only relevant data segments for each simulation step, reducing overall memory requirements.
Data Source
AI summary
A three-dimensional optoelectrical simulation includes generating a process simulation result including a doping profile of a silicon substrate of image sensor, a structure simulation result with respect to a back end of line structure, and a merged result generated by merging a process simulation result and a structure simulation result, selectively extending the merged result to an extended result by using a process simulation result or a structure simulation result, generating a segmented result for each pixel based on a merged result or an extended result, an optical crosstalk simulation result of image sensor based on a structure simulation result and an optical mesh, and a final simulation result including an electrical crosstalk simulation result of the image sensor based on a segmented result for each pixel and an optical crosstalk simulation result.