Image Sensor Gate Biasing for Dark Current Reduction

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Solution Overview

Problem

Dark current, which degrades image quality by accumulating at semiconductor-dielectric interfaces in image sensors, particularly at adjacent gates, is not effectively eliminated by existing technologies, including pinned photodiodes.

Innovation Solution

The method involves biasing the gate to accumulate majority carriers at the semiconductor-dielectric interface during integration, creating a potential profile that drains away dark current from the photogeneration diffusion, and using a potential barrier or gradient to separate dark current from signal charge, ensuring it does not contribute to the image signal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If electrons accumulate at semiconductor-dielectric interface during integration, then charge collection is enabled, but undesirable dark current degrades image quality

Engineering Contradiction:
Improvecharge accumulationVSAvoiddark current
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The patent segments the charge collection process by spatially separating signal charge and dark current through potential barriers. The pinned photodiode structure creates distinct potential wells: one for collecting signal charge from the photosensitive area and another configuration for repelling or draining dark current electrons generated at the semiconductor-dielectric interface, preventing their migration into the photosensitive area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent converts the harmful effect of dark current generation at the semiconductor-dielectric interface into a beneficial separation mechanism. By applying specific potentials to adjacent gates, the potential barrier not only prevents dark current migration but also enhances the collection efficiency of signal charge in the photosensitive area, turning the interface into a selective filter rather than a source of degradation.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach substantially eliminates dark current adjacent to gates and other structures, improving image sensor performance by keeping dark charge separate from signal charge, thereby enhancing image quality.

Implementation Method 1

the gate is held at a voltage which will accumulate majority carriers at a semiconductor-dielectric interface during integration for the photosensitive area

Methodology Applied
Scientific EffectElectrical field: Electric Field

Implementation Method 2

accumulate majority carriers at a semiconductor-dielectric interface

Methodology Applied
Scientific EffectCharge accumulation:

Implementation Method 3

the potential profile under the adjoining gate is created so that dark current related to the gate is drained away from the photogeneration diffusion

Methodology Applied
Scientific EffectPotential profile:

Implementation Method 4

a photosensitive area for receiving incident light which is converted into a charge

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS7973836B2Camera, image sensor, and method for decreasing undesirable dark current
Publication Date: 2011.07.05 OMNIVISION TECHNOLOGIES INC
  • US7973836B2 patent drawing
  • US7973836B2 patent drawing
  • US7973836B2 patent drawing

AI summary

A method for lowering dark current in an image sensor pixel, the method includes the steps of providing a photosensitive area for receiving incident light which is converted into a charge; providing a gate for transferring charge from the photosensitive area; wherein the gate is held at a voltage which will accumulate majority carriers at a semiconductor-dielectric interface during integration for the photosensitive area. Alternatively, a potential profile can be provided under the gate to drain the dark current away from the photogeneration diffusion.