Image Sensor Light Guide Liner for Adjustable Light Sensitivity
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Solution Overview
Problem
Conventional image sensors face challenges in controlling light receiving efficiency due to a preset thickness of the passivation layer, which limits the ability to adjust light guide thickness and consequently affects light sensitivity, especially in the near-infrared range.
Innovation Solution
Incorporating a liner with controllable thickness in the light guide, rather than a passivation layer, allows for adjustable light receiving efficiency by varying the liner's thickness within a range of 50 Å to 3000 Å, and extending it to both pixel and surrounding regions for improved process convenience.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a passivation layer is used in the light guide, then device reliability is improved, but light receiving efficiency cannot be controlled due to preset thickness
Solution Approach 1:
The patent divides the original passivation layer function into two separate components: a passivation layer for reliability protection and a liner for light receiving efficiency control. This segmentation allows each layer to independently fulfill its specific function without compromising the other, resolving the contradiction between maintaining device reliability and enabling adjustable light receiving efficiency.
Solution Approach 2:
The patent introduces a liner with adjustable thickness parameters (50 Å to 3000 Å) that can be optimized for different light receiving requirements. By changing the thickness parameter of the liner, the light receiving efficiency can be controlled without affecting the passivation layer's protective function, thus achieving adaptability while maintaining reliability.
2Reliability
If the passivation layer thickness is increased, then device protection is improved, but light sensitivity deteriorates
Solution Approach 1:
The patent separates the protective function (passivation layer) from the optical function (liner), allowing the passivation layer to be optimized for device protection without compromising light sensitivity. The liner, being thinner and specifically designed for optical performance, ensures light sensitivity is maintained while the passivation layer provides necessary protection.
3Use of energy by moving object
If the passivation layer thickness is decreased, then light sensitivity is improved, but device protection deteriorates
Solution Approach 1:
By dividing the functions into separate layers, the patent allows the liner to be optimized for light sensitivity with appropriate thickness while the passivation layer maintains sufficient thickness for device protection. This resolves the contradiction by enabling each parameter to be independently optimized.
4Ease of manufacture
If a continuous passivation layer is formed in the light guide, then manufacturing simplicity is improved, but process flexibility deteriorates
Solution Approach 1:
The patent separates the passivation layer formation from the liner formation processes. The passivation layer can be formed using standard continuous deposition methods for manufacturing simplicity, while the liner can be selectively formed with controlled thickness for process flexibility. This segmentation allows both manufacturing simplicity and process flexibility to be achieved.
Data Source
AI summary
Disclosed are an image sensor and a method of manufacturing the same. More particularly, an image sensor and a method of manufacturing the same including a passivation layer on or at a boundary, but not in a light guide, and a separate liner is in the light guide, to control the light receiving efficiency of the image sensor according to the thickness of the liner.