Image Sensor Micro Lens and Protective Pattern Segmentation

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Solution Overview

Problem

Existing image sensor manufacturing processes face challenges in minimizing image defects and simplifying the production process, particularly in forming color filters and micro lens layers without causing striation defects or height differences that can affect image accuracy.

Innovation Solution

The image sensor design includes a substrate with a pixel region, pad region, and optical black region, featuring a micro lens layer and protective patterns made from the same transparent material, which are separated to reduce stress and simplify the manufacturing process, and a method involving etching and photolithography to form convex lens portions and protective patterns, ensuring accurate formation of color filters and minimizing defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single-layer lens structure is used to cover both pad region and pixel region, then the manufacturing process is simplified, but stress concentration and image defects occur during chip division

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidimage quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The lens layer is segmented into two separate structures: a first protective pattern covering the pad region and a micro lens layer covering the pixel region. This segmentation allows each layer to be optimized independently - the protective pattern prevents stress concentration at pad regions during chip division, while the micro lens layer maintains focusing functionality, thereby resolving the contradiction between manufacturing simplicity and image quality reliability

Inventive Principle:
Principle #1Segmentation

2Productivity

If color filters and micro lens layers are formed using conventional processes, then production is efficient, but striation defects and height differences occur affecting image accuracy

Engineering Contradiction:
Improveproduction efficiencyVSAvoidcolor filter accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The formation of color filters and micro lens layers is merged into a single integrated process step. By forming both structures simultaneously using the same photolithography and reflow processes, the patent eliminates striation defects and height differences that would otherwise require separate processing steps, thereby maintaining high productivity while achieving superior manufacturing precision

Inventive Principle:
Principle #5Merging (Combining)

3Adaptability or versatility

If protective patterns and micro lens layer are made from different materials, then functional requirements are met, but manufacturing complexity and material compatibility issues arise

Engineering Contradiction:
Improvefunctional adaptabilityVSAvoidmaterial layer complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The protective pattern and micro lens layer are formed from the same transparent resin material, creating a homogeneous structure. This homogeneity simplifies the manufacturing process by eliminating material compatibility issues and interface problems, while the structural differentiation (protective pattern vs. lens portions) maintains the necessary functional adaptability for both stress protection and optical focusing

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances image sensor reliability by reducing image defects and simplifying the manufacturing process, improving the accuracy of color filters and micro lens formation, and preventing stress-related issues during chip division.

Implementation Method 1

The photodiode may convert incident light into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

a micro lens layer on the second surface of the substrate in the pixel region

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11031425B2Image sensor and method of manufacturing the same
Publication Date: 2021.06.08 SAMSUNG ELECTRONICS CO LTD
  • US11031425B2 patent drawing
  • US11031425B2 patent drawing
  • US11031425B2 patent drawing

AI summary

An image sensor includes a substrate including a pixel region and a pad region, a first conductive pad on the substrate in the pad region, a micro lens layer on the substrate in the pixel region, and a first protective pattern covering the pad region and exposing the first conductive pad. The first protective pattern and the micro lens layer include the same material, and the first protective pattern and the micro lens layer are apart from each other.