Image Sensor Position Misalignment Detection for Semiconductor Transfer
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Solution Overview
Problem
Existing semiconductor wafer positioning systems require a dedicated positioning device to detect misalignment, which increases system complexity and footprint.
Innovation Solution
A detection device comprising an image sensor and a calculation unit that captures images of the transfer mechanism and object to calculate position misalignment in both horizontal and rotational directions, allowing for accurate positioning without a separate positioning device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a dedicated positioning device is used to detect misalignment, then positioning accuracy is improved, but device complexity increases
Solution Approach 1:
The patent combines the imaging function and positioning detection function into a single integrated system. The image sensor captures images that simultaneously provide both visual information and positioning data, eliminating the need for separate positioning devices and reducing overall system complexity while maintaining positioning accuracy.
Solution Approach 2:
The image sensor serves multiple functions: it captures images for visual monitoring and simultaneously extracts positioning information for alignment detection. This multi-functional approach replaces dedicated positioning devices, reducing device complexity while preserving measurement precision through computational analysis of the captured images.
2Measurement precision
If a dedicated positioning device is used to detect misalignment, then positioning accuracy is improved, but system footprint increases
Solution Approach 1:
The patent merges the positioning detection functionality into the existing imaging system, eliminating the need for additional dedicated positioning hardware. This integration reduces the physical space required for the system while maintaining positioning accuracy through image-based analysis methods.
Solution Approach 2:
The image sensor performs both imaging and positioning detection functions, allowing the system to achieve accurate positioning without adding dedicated positioning devices that would increase footprint. The computational processing of image data enables positioning accuracy to be maintained while minimizing physical space requirements.
Data Source
AI summary
There is provided a detection device for detecting position misalignment of an object to be transferred with respect to a transfer mechanism. The detection device comprises: an image sensor configured to capture images including the transfer mechanism and the object to be transferred which is held by the transfer mechanism; and a calculation unit configured to calculate an amount of position misalignment including misalignment in a horizontal direction and a rotational direction of the object to be transferred based on the images captured by the image sensor.