Image Sensor Pixel Structure With Vertical Multi-Gate Charge Transfer

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Solution Overview

Problem

Current image sensors face challenges in achieving improved image quality due to limitations in pixel design and transfer efficiency, particularly in handling varying light conditions and dynamic ranges.

Innovation Solution

The image sensor incorporates a novel pixel structure with a first sub-pixel and a second sub-pixel, each equipped with a photoelectric conversion area, floating diffusion area, and transfer transistors, where the second transfer transistor features a vertical multi-gate, enhancing charge transfer efficiency and dynamic range handling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional transfer transistors are used in pixel design, then device complexity is reduced, but charge transfer efficiency and dynamic range handling deteriorate

Engineering Contradiction:
Improvecharge transfer efficiencyVSAvoidtransfer transistor structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The transfer gate is extended from a conventional planar two-dimensional structure into the vertical third dimension, creating a multi-gate structure that wraps around the channel. This vertical extension increases the gate-channel interaction area without increasing the planar footprint, thereby improving charge transfer efficiency while maintaining compact pixel design

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The multi-gate structure is formed by nesting multiple gate layers around a central channel region. The gates are arranged in a nested configuration where inner gates surround the channel and outer gates provide additional control, creating a compact three-dimensional transistor structure that enhances transfer efficiency

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If pixel area is increased to improve dynamic range, then full well capacity increases, but pixel density and resolution deteriorate

Engineering Contradiction:
Improvedynamic rangeVSAvoidpixel area
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

The transfer gate structure extends vertically into the third dimension, increasing the effective gate area and charge control capability without increasing the horizontal pixel footprint. This allows enhanced dynamic range and full well capacity to be achieved within the same planar pixel area, maintaining high pixel density

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If conventional single-gate transfer transistors are used, then manufacturing process is simpler, but charge transfer efficiency and signal-to-noise ratio deteriorate

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidtransfer gate fabrication
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The transfer gate is formed by extending gate structures vertically and arranging multiple gates in a nested configuration around the channel. This three-dimensional arrangement increases the gate-channel interaction area, improving charge transfer efficiency and signal-to-noise ratio while using standard semiconductor fabrication processes

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The nested multi-gate structure serves multiple functions simultaneously: it provides enhanced charge transfer control, increased capacitive coupling, improved signal-to-noise ratio, and compact area utilization. The same structural configuration achieves multiple performance goals without requiring separate components

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design improves image quality by increasing signal-to-noise ratio and dynamic range, enabling better performance across different illuminance levels and enhancing the full well capacity of the image sensor.

Implementation Method 1

The photodiode may convert incident light thereto into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20230395621A1Image sensor
Publication Date: 2023.12.07 SAMSUNG ELECTRONICS CO LTD
  • US20230395621A1 patent drawing
  • US20230395621A1 patent drawing
  • US20230395621A1 patent drawing

AI summary

An image sensor including a plurality of pixels, wherein each pixel of the plurality of pixels comprises: a first sub-pixel comprising a first photoelectric conversion area, a first floating diffusion area, and a first transfer transistor configured to transfer charges accumulated in the first photoelectric conversion area to the first floating diffusion area; and a second sub-pixel disposed adjacent to the first sub-pixel and comprising a second photoelectric conversion area, a second floating diffusion area and a second transfer transistor configured to transfer charges accumulated in the second photoelectric conversion area to the second floating diffusion area, wherein the first transfer transistor comprises a first transfer gate, wherein the second transfer transistor comprises a second transfer gate, and wherein the second transfer gate comprises a vertical multi-gate