Image Sensor Pixel Opening Layout for Precise Pixel Localization
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Solution Overview
Problem
Current pixel structure localization methods in image sensors are inaccurate, hindering subsequent analysis such as physical failure analysis, which increases manufacturing costs and process time.
Innovation Solution
An image sensor structure is designed with a first and second pixel structure, where the second pixel structure has a smaller opening width in the conductive layer stack, resulting in a different luminous flux compared to the first pixel structure, allowing for precise localization of the first pixel structure using the second as a reference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional pixel structure localization methods are used, then the manufacturing process continues, but the localization accuracy is insufficient and PFA cannot be performed smoothly
Solution Approach 1:
The patent uses different luminous flux characteristics (analogous to color/optical property changes) to create distinguishable pixel structures. The first pixel structure has a first luminous flux and the second pixel structure has a second luminous flux that is different from the first, enabling optical identification methods to accurately locate and distinguish between different pixel structures during PFA processes
Solution Approach 2:
The patent introduces local differentiation by creating specific pixel structures with distinct luminous flux properties at particular locations. The first pixel structure and second pixel structure are designed with different optical characteristics (different luminous flux) to serve as unique identifiers, allowing precise localization without affecting the overall manufacturing process
2Measurement precision
If accurate pixel structure localization is achieved through distinct luminous flux design, then PFA efficiency improves, but the device structure becomes more complex
Solution Approach 1:
The patent changes optical parameters (luminous flux) of existing pixel structures to create identification features. By adjusting the luminous flux parameter of specific pixel structures rather than introducing entirely new structural elements, the solution achieves accurate identification while minimizing increases in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables accurate localization of the first pixel structure, facilitating improved analysis processes and reducing manufacturing costs and time by utilizing the distinct luminous flux difference between the two pixel structures.
Implementation Method 1
The first pixel structure includes a first light sensing device. The first light sensing device is disposed in the substrate. The second pixel structure includes a second light sensing device. The second light sensing device is disposed in the substrate.
Data Source
AI summary
An image sensor structure including a substrate, a first pixel structure, a second pixel structure, a dielectric layer, and a conductive layer stack is provided. The first pixel structure includes a first light sensing device. The second pixel structure includes a second light sensing device. The conductive layer stack includes conductive layers. The conductive layer stack has a first opening and a second opening. The first opening is located directly above the first light sensing device and passes through the conductive layers. The second opening is located directly above the second light sensing device and passes through the conductive layers. The second minimum width of the second opening is smaller than the first minimum width of the first opening. The luminous flux of the second pixel structure is different from the luminous flux of the first pixel structure.