Image Sensor Pixel Support Structure for Leaning Prevention
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Solution Overview
Problem
Image sensors face challenges in maintaining product reliability and quality due to the leaning phenomenon of unit pixels caused by the increased aspect ratio of the pixel separation pattern, which affects the separation and support of adjacent pixels.
Innovation Solution
The implementation of a support structure positioned at grid points of the pixel separation pattern to support adjacent unit pixels, preventing the leaning phenomenon and enhancing the separation between pixels, while also using a pixel separation pattern and a filling film to improve photo receiving efficiency and reduce defects like ESD bruise defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the pixel separation pattern is made deeper to improve separation, then pixel separation is enhanced, but the structural stability of adjacent pixels deteriorates
Solution Approach 1:
The support structure is divided into multiple discrete support portions positioned at specific grid points rather than forming a continuous structure. This segmentation allows the support to be strategically placed at corner positions where unit pixels are most vulnerable to leaning, providing stability without interfering with the deep pixel separation pattern.
Solution Approach 2:
The support structure comprises a filling material positioned within a trench formed in the substrate. This composite structure (trench + filling material) provides mechanical support to prevent pixel leaning while allowing the pixel separation pattern to extend deeply for improved separation.
Data Source
AI summary
An image sensor includes a substrate which includes a plurality of unit pixels. Each of the plurality of unit pixels includes a photoelectric conversion layer. A pixel separation pattern is disposed in the substrate and has a and shape that includes a plurality of grid points. The pixel separation pattern is configured to separate each of the plurality of unit pixels from each other. A support structure is disposed in the substrate and is positioned to correspond to the plurality of grid points of the pixel separation pattern. The support structure is configured to support adjacent unit pixels of the plurality of unit pixels.