Laminated Image Sensor Light-Shielding Film Against Stray Light Degradation
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Solution Overview
Problem
Laminated imaging devices face challenges in maintaining photoelectric conversion performance due to deterioration of light-shielding films at high temperatures and exposure to atmosphere, leading to performance degradation and image quality issues.
Innovation Solution
Incorporating a light-shielding film made of titanium or tantalum with a functional film of titanium nitride or tantalum nitride, which has a thickness less than the light-shielding film, to prevent deterioration and suppress stray light, thereby maintaining image quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a light-shielding film is used in laminated imaging devices, then stray light is blocked and image quality is improved, but the light-shielding film deteriorates at high temperatures and exposure to atmosphere, leading to performance degradation
Solution Approach 1:
The patent applies composite materials by combining the light-shielding film (containing titanium or tantalum) with a functional film (titanium nitride or tantalum nitride) to create a multi-layer structure. This composite structure maintains the light-shielding capability while the functional film provides protection against high-temperature deterioration and atmospheric exposure, resolving the contradiction between stray light blocking and film durability.
2Device complexity
If the functional film thickness is reduced, then manufacturing cost and process complexity are reduced, but protection effectiveness may be compromised
Solution Approach 1:
The patent applies parameter changes by optimizing the thickness of the functional film to be less than the thickness of the light-shielding film. This parameter optimization provides a balanced solution where the functional film is sufficiently thin to reduce manufacturing complexity and cost, yet thick enough to maintain effective protection of the photoelectric converter from high temperatures and atmospheric exposure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents performance degradation by shielding light and protecting the photoelectric converter from high temperatures and environmental exposure, reducing flare and coloring, and enhancing image quality.
Implementation Method 1
a light-shielding film that is located above the second portion of the photoelectric converter and that contains titanium or tantalum
Implementation Method 2
a functional film that is located on the light-shielding film and that is in contact with the light-shielding film... to prevent deterioration
Implementation Method 3
protecting the photoelectric converter from high temperatures and environmental exposure
Data Source
AI summary
An imaging device includes: a semiconductor substrate; an effective pixel region including an effective pixel; a non-effective pixel region that is located around the effective pixel region and that does not include the effective pixel; a photoelectric converter that is located above the semiconductor substrate and that includes a first portion located in the effective pixel region and a second portion located in the non-effective pixel region; a light-shielding film that is located above the second portion of the photoelectric converter and that contains titanium or tantalum; and a functional film that is located on the light-shielding film and that is in contact with the light-shielding film. The functional film has a thickness less than a thickness of the light-shielding film.