Image Sensor Shielding Interconnects for Pixel Density

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Solution Overview

Problem

Highly integrated image sensors with small-sized pixels produce insufficient photocharges, leading to decreased image resolution due to inadequate electron conversion gain.

Innovation Solution

The design incorporates signal interconnects and shielding interconnects to improve electron conversion gain by applying voltage to the shielding interconnects, optimizing pixel operations and increasing resolution and sharpness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If pixels are made smaller to increase integration, then pixel density increases, but photocharge production becomes insufficient leading to decreased image resolution

Engineering Contradiction:
Improvepixel densityVSAvoidimage resolution
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent changes the electrical parameters of the pixel by introducing shielding interconnects that apply voltage to the floating diffusion region. This voltage application modifies the electric field distribution, enabling small pixels to generate sufficient photocharges despite their reduced size, thus maintaining image resolution while achieving high pixel density

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If shielding interconnects are added to improve electron conversion gain, then voltage boosting is achieved, but device complexity increases

Engineering Contradiction:
Improveelectron conversion gainVSAvoidinterconnect structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The shielding interconnects serve multiple functions: they provide voltage boosting to enhance electron conversion gain, acts as shielding to reduce noise, and integrate with existing pixel structures. This multi-functionality allows the additional interconnects to justify their presence by delivering multiple benefits rather than adding complexity for a single purpose

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the conversion of electrons into voltage, even with a small amount of electrons transferred, thereby improving image forming capability and resolution.

Implementation Method 1

Some embodiments of the disclosed technology provide a method capable of boosting a voltage by coupling the signal interconnects

Methodology Applied
Scientific EffectCapacitive coupling: Capacitance

Data Source

PatentUS11233084B2Image sensor having shielding interconnects
Publication Date: 2022.01.25 SK HYNIX INC
  • US11233084B2 patent drawing
  • US11233084B2 patent drawing
  • US11233084B2 patent drawing

AI summary

An image sensor includes one or more first unit pixels. Each of the one or more first unit pixels may include a first photoelectric conversion region including first photoelectric conversion elements arranged in the form of a matrix, and a first floating diffusion region at a center of the first photoelectric conversion elements; a first transistor region including a first active region in which a first reset gate, a first select gate and a first drive gate are disposed; a first signal interconnect electrically connecting the first floating diffusion region to the first drive gate; and a first shielding interconnect separated from the first signal interconnect and extending parallel to the first signal interconnect.