Image Sensor Temperature Diode Isolation via P-Type Implant

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Solution Overview

Problem

The compatibility between temperature sensors and electronic shutter pulses in image sensors is compromised due to substrate punch-through, leading to corrupted temperature readings and potential damage to the reading components.

Innovation Solution

The design includes a substrate with specific conductivity type regions and dopant densities to minimize substrate punch-through, allowing the temperature sensor to operate independently of the electronic shutter pulse, with a timing generator and processor coordinating the shutter pulse application and temperature measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a high voltage pulse is applied to the substrate for electronic shutter function, then charge is drained from photodiodes, but substrate punch-through occurs and corrupts temperature diode readings

Engineering Contradiction:
Improveelectronic shutter functionVSAvoidtemperature measurement accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

A p-type implant region is introduced as an intermediary layer between the n-type substrate and the temperature diode. This intermediate region acts as a barrier that prevents the high voltage electronic shutter pulse from causing substrate punch-through that would otherwise corrupt temperature diode readings, while allowing the temperature measurement function to operate independently.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies a specific dopant concentration profile locally at the temperature diode region, with the p-type implant region having a higher dopant concentration than surrounding areas. This localized modification of material properties creates an electrical barrier specifically where needed to protect the temperature diode from substrate punch-through effects during electronic shutter operation.

Inventive Principle:
Principle #3Local quality

2Productivity

If high voltage pulse is applied for electronic shutter, then global reset is achieved, but voltage increase across temperature diode damages reading component

Engineering Contradiction:
Improveimage capture efficiencyVSAvoidreading component integrity
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The p-type implant region serves as a protective intermediary that blocks the propagation of high voltage from the substrate to the temperature diode and reading component. This prevents voltage spikes during electronic shutter operation from reaching and damaging the sensitive reading component, while still allowing the electronic shutter function to perform global reset effectively.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If temperature diode is used for temperature sensing, then temperature measurement is enabled, but substrate punch-through alters the voltage-current relationship

Engineering Contradiction:
Improvetemperature measurement capabilityVSAvoidvoltage-current relationship stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent modifies the local electrical properties of the substrate by introducing a p-type implant region with specific dopant concentration and depth profile. This creates a localized electrical barrier that maintains the stability of the temperature diode's voltage-current relationship by preventing substrate punch-through, while preserving the temperature sensing capability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The p-type implant region acts as a sacrificial structural element that absorbs the stress of high voltage pulses, protecting the more critical temperature diode and reading component from damage. This one-way protection structure is designed to handle the transient high voltage conditions without compromising the permanent measurement functions.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration ensures accurate temperature measurements without disruption from the electronic shutter pulse, preventing damage to the reading components and maintaining sensor performance.

Implementation Method 1

The relationship between the voltage across the diode and the current through the diode is temperature dependent. In other words, at the same voltage, the current increases with the temperature. Likewise, at the same current, the absolute value of the voltage decreases with the temperature.

Methodology Applied
Scientific EffectTemperature-dependent electrical characteristics of diode: Diode

Implementation Method 2

a processor connected to the reading component can control a thermoelectric cooler coupled to the image sensor based on the temperature measurements

Methodology Applied
Scientific EffectPeltier effect: Peltier Effect

Implementation Method 3

a first well in the substrate and having an opposite conductivity type and doped with opposite conductivity type dopant at a first dosage at a first implantation energy, a second well in the first well and having the opposite conductivity type and doped with opposite conductivity type dopant at a second dosage higher than the first dosage

Methodology Applied
Scientific EffectElectrical barrier formation through doping: Dopants

Data Source

PatentUS9093573B2Image sensor including temperature sensor and electronic shutter function
Publication Date: 2015.07.28 SEMICON COMPONENTS IND LLC
  • US9093573B2 patent drawing
  • US9093573B2 patent drawing
  • US9093573B2 patent drawing

AI summary

An image sensor includes a substrate having a first conductivity type. A first well in the substrate has an opposite conductivity type and is doped with opposite conductivity type dopant. A second well in the first well has the opposite conductivity type and is doped with opposite conductivity type dopant. A first region in the second well has the opposite conductivity type and is doped with opposite conductivity type dopant. A second region in the first region has the first conductivity type and is doped with first conductivity type dopant. A third region in the second well adjacent the first region is of the opposite conductivity type and is doped with opposite conductivity type dopant. A temperature sensor is disposed between, and is connected to each of, the second region and the third region.