Image Sensor Symmetrical Transistors Integration Density

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Solution Overview

Problem

The challenge is to develop an image sensor with improved performance that can integrate a high number of unit pixels within a limited area without deteriorating image quality, as reducing pixel size leads to reduced photon reception and increased noise due to differences in the forms and sizes of transfer and reset transistors.

Innovation Solution

The image sensor incorporates symmetrical transfer and reset transistors with vertically overlapping photoelectric conversion elements, maximizing fill factor and integration density, and using undoped or P-type polysilicon channel layers to maintain image quality by ensuring consistent charge transfer and reset operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the pixel size is reduced to increase integration density, then the number of unit pixels per area increases, but the photon reception area decreases and noise increases

Engineering Contradiction:
Improveintegration densityVSAvoidnoise
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent applies asymmetry by configuring the transfer transistor and reset transistor with different structures (different channel layer types or doping configurations) to optimize their respective functions. The transfer transistor uses a channel layer configuration optimized for charge transfer, while the reset transistor uses a configuration optimized for reset operations, thereby maintaining low noise and high performance even in reduced pixel sizes

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent utilizes vertical stacking of transistors and photoelectric conversion elements to transition from a planar layout to a three-dimensional structure. This allows multiple functional elements to be integrated within a smaller footprint area, increasing integration density without proportionally reducing the photoelectric conversion area, thereby maintaining photon reception capability while reducing pixel size

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If the pixel size is reduced to increase integration density, then the number of unit pixels per area increases, but image quality deteriorates

Engineering Contradiction:
Improveintegration densityVSAvoidimage quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent employs asymmetric design where the transfer transistor and reset transistor have different structural configurations optimized for their specific functions. This allows each transistor to perform its operation more efficiently, maintaining high image quality through precise charge transfer and reset operations even when pixel dimensions are reduced for higher integration density

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent changes material parameters by using different polysilicon channel layer types (undoped vs. doped) for the transfer and reset transistors. This parameter variation optimizes the electrical characteristics of each transistor, ensuring high-performance charge transfer and reset operations that maintain image quality in high-density pixel arrays

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If different forms and sizes of transfer and reset transistors are used, then functional optimization is achieved, but manufacturing complexity increases

Engineering Contradiction:
Improvefunctional optimizationVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent segments the transistor design into distinct functional units with different channel layer configurations. By dividing the transistor structure into separable components (gate, channel layer, source/drain regions) with specific optimizations for transfer or reset functions, the design achieves functional optimization while maintaining manufacturing feasibility through modular fabrication processes

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances image quality by maintaining consistent charge transfer and reset operations, reducing noise, and allowing for higher integration density without deteriorating pixel characteristics, thus providing high-quality images.

Implementation Method 1

An image sensor converts an optical image into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS10438981B2Image sensor
Publication Date: 2019.10.08 SK HYNIX INC
  • US10438981B2 patent drawing
  • US10438981B2 patent drawing
  • US10438981B2 patent drawing

AI summary

An image sensor, comprising: a photoelectric conversion element; a transfer transistor formed over the photoelectric conversion element; and a reset transistor formed over the photoelectric conversion element, formed substantially at the same level as the transfer transistor, and spaced apart from the transfer transistor by a gap, wherein the transfer transistor and the reset transistor are trench-type transistors and are symmetrical structure to each other with respect to the gap, wherein the photoelectric conversion element is a continuous layer under both the transfer transistor and the reset transistor, and is completely below the transfer transistor and the reset transistor.