Image Sensor Wafer Testing Dual-Pass Defect Detection

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Solution Overview

Problem

Current image sensor wafer testing systems often overlook subtle pixel defects, such as blemish defects, during high-throughput testing, leading to potential defects being packaged into devices and causing image quality issues, resulting in increased costs for manufacturers and users.

Innovation Solution

An image sensor testing apparatus with a dual-pass testing method, utilizing an interface card with a programmable processor to process pixel data, allowing for enhanced detection of defects without significant sacrifices in testing speed and throughput, by converting pixel data into luminance and chrominance for improved defect identification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional high-throughput testing methods are used, then testing speed and productivity are maintained, but subtle pixel defects such as blemish defects are overlooked

Engineering Contradiction:
Improvedefect detection precisionVSAvoidtesting throughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The testing process is divided into two distinct passes: a first pass for high-speed screening and a second pass for detailed defect analysis. This segmentation allows the system to maintain high throughput in the first pass while achieving high precision in the second pass, resolving the contradiction between speed and accuracy in defect detection

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first pass performs preliminary screening to identify potential defects quickly, filtering out obviously good wafers before subjecting them to the more time-consuming second pass analysis. This preliminary action maintains overall productivity while ensuring that subtle defects are not missed in the subsequent detailed examination

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If detailed defect analysis is performed on all wafers, then detection precision improves, but testing time increases significantly

Engineering Contradiction:
Improvepixel defect detection accuracyVSAvoidtesting time per wafer
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system applies partial detailed analysis only to wafers that show potential issues in the first pass, rather than performing exhaustive analysis on all wafers. This selective application of detailed testing maintains high detection accuracy for defective wafers while minimizing time loss on obviously good wafers

Inventive Principle:
Principle #16Partial or excessive action

3Reliability

If subtle blemish defects are detected early, then manufacturing costs are reduced, but more complex processing is required

Engineering Contradiction:
Improveimage quality reliabilityVSAvoidtesting system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The testing system is segmented into modular components with distinct functions: a first pass module for rapid screening and a second pass module for detailed analysis. This modular segmentation manages system complexity by organizing functions into separate, manageable units while achieving high reliability through comprehensive defect detection

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The interface card with programmable processor acts as an intermediary that coordinates between the two testing passes and manages data flow. This intermediary component simplifies the overall system architecture by providing a centralized control point, making the complex multi-pass system more manageable and maintainable

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS8000520B2Apparatus and method for testing image sensor wafers to identify pixel defects
Publication Date: 2011.08.16 OMNIVISION TECHNOLOGIES INC
  • US8000520B2 patent drawing
  • US8000520B2 patent drawing
  • US8000520B2 patent drawing

AI summary

An image sensor testing apparatus is disclosed. The image sensor testing apparatus includes an electronic test system having a light source for illuminating an image sensor wafer to generate pixel data and a host processor for receiving the pixel data. An interface card coupled to the electronic test system has a programmable processor for processing the pixel data to generate processed data, the processed data transmitted to and analyzed by the host processor together with the pixel data to detect pixel defects in the image sensor wafer.