Imaging Device Cursor Superposition for Multi-Section Alignment
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Solution Overview
Problem
High-magnification imaging devices like scanning electron microscopes face difficulties in specifying corresponding positions across multiple sample sections due to narrow fields of view, making it challenging to align and observe the same positions accurately.
Innovation Solution
An imaging device generates a cursor to specify the observation region on one sample section and superimposes it on another, calculating coordinates for corresponding regions, thereby facilitating easy alignment and observation across multiple sections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high magnification is used to observe sample sections, then observation detail is improved, but field of view becomes narrow making it difficult to specify corresponding positions
Solution Approach 1:
The patent divides the observation process into two stages: first acquiring an overview image at low magnification to identify the region of interest and its position, then acquiring a detailed image at high magnification of only that specific region. This segmentation allows the system to maintain both a broad field of view for localization and high magnification for detailed observation, resolving the contradiction between field of view size and observation detail.
2Measurement precision
If characteristic points are extracted for position alignment, then position correspondence can be specified, but it becomes difficult to identify characteristic points in narrow field of view at high magnification
Solution Approach 1:
The patent performs preliminary action by first acquiring an overview image at low magnification to identify and locate characteristic points or regions of interest before acquiring detailed images at high magnification. This preliminary localization makes it easier to identify and specify characteristic points, as they are visible in the broader context of the overview image, thereby resolving the contradiction between position alignment accuracy and ease of specifying characteristic points.
3Measurement precision
If electron beam irradiation is extended to find specific regions in multiple sections, then corresponding positions can be identified, but sample damage increases
Solution Approach 1:
The patent segments the imaging process into a low-magnification overview stage and a high-magnification detailed stage. By first identifying the region of interest and its coordinates in the overview image, the system can then directly navigate to and image only the specific corresponding region in subsequent sections at high magnification. This eliminates the need for extensive electron beam irradiation across entire sections to locate regions of interest, thereby reducing sample damage while maintaining position identification accuracy.
Data Source
AI summary
An object of the invention is to easily acquire images of a position corresponding among a plurality of sample sections in an imaging device that acquires images of the plurality of sample sections. The imaging device according to the invention generates a cursor for specifying a first observation region and a contour portion of a first sample section, and superimposes the cursor on a contour portion of a second sample section so as to calculate coordinates of a second observation region of the second sample section.