Solid-State Imaging Device Charge Accumulation Gradient

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Solution Overview

Problem

In solid-state imaging devices, there is a tradeoff between increasing the saturation charge quantity and speeding up charge transfer, as enlarging the charge-accumulating unit size to increase saturation charge quantity leads to longer transfer times, potentially causing image lag and inhibiting speed-up of imaging.

Innovation Solution

The device includes charge-discharging units aligned with charge-accumulating units to discharge excess charges and prevent blooming, with a configuration where the charge-discharging units share a drain region and have a gate region to control charge flow, and the charge-accumulating units have a gradually changing impurity concentration to accelerate charge migration without inhibiting size enlargement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the charge-accumulating unit size is enlarged to increase saturation charge quantity, then the saturation charge quantity is improved, but the charge transfer time becomes longer

Engineering Contradiction:
Improvesaturation charge quantityVSAvoidcharge transfer time
Core Design Contradiction:
Quantity of substanceVSLoss of time

Solution Approach 1:

The patent applies local quality by creating a non-uniform impurity concentration distribution within the charge-accumulating unit. Specifically, the impurity concentration is designed to gradually decrease from the bottom surface toward the light-receiving surface, creating regions with different electrical properties. This gradient structure accelerates charge migration in specific areas without requiring a complete redesign of the entire charge-accumulating unit, thus increasing saturation charge quantity while maintaining efficient charge transfer.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by making the charge transfer process adaptable through the impurity concentration gradient. The varying impurity concentration creates dynamic electric field conditions that optimize charge migration speed at different depths. This dynamic structure allows the system to handle both large charge quantities and maintain transfer speed, resolving the contradiction between saturation charge quantity and transfer time.

Inventive Principle:
Principle #15Dynamics

2Quantity of substance

If the charge-accumulating unit size is enlarged to increase saturation charge quantity, then the saturation charge quantity is improved, but imaging speed is inhibited

Engineering Contradiction:
Improvesaturation charge quantityVSAvoidimaging speed
Core Design Contradiction:
Quantity of substanceVSProductivity

Solution Approach 1:

By introducing local quality variations through the impurity concentration gradient, the patent creates optimized regions for charge accumulation and transfer within the enlarged charge-accumulating unit. This allows the unit to maintain large size for high saturation charge quantity while specific regions facilitate rapid charge transfer, preserving imaging speed.

Inventive Principle:
Principle #3Local quality

3Quantity of substance

If gate electrodes are applied with electric potential to increase potential in the second direction, then charge accumulation is improved, but charge transfer speed is reduced

Engineering Contradiction:
Improvecharge accumulationVSAvoidcharge transfer speed
Core Design Contradiction:
Quantity of substanceVSSpeed

Solution Approach 1:

The patent applies parameter changes by modifying the impurity concentration parameter within the charge-accumulating unit. Instead of relying solely on gate electrode potentials, the impurity concentration gradient creates inherent electric field variations that facilitate both charge accumulation and rapid transfer. This parameter modification allows the system to achieve both goals without the tradeoff imposed by gate electrode control alone.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for both increased saturation charge quantity and accelerated charge transfer, preventing image lag and blooming while maintaining efficient imaging speed.

Implementation Method 1

a plurality of charge-accumulating units, each being adapted to accumulate a charge generated in the corresponding photoelectric converting units; wherein each of the plurality of charge-accumulating units includes a gradually changing impurity concentration in a second direction

Methodology Applied
Scientific EffectImpurity concentration gradient: Diffusion

Implementation Method 2

each being adapted to accumulate a charge generated in the corresponding photoelectric converting units; and a charge-output unit adapted to obtain charges respectively transferred from the plurality of charge-accumulating units

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

a plurality of photoelectric converting units aligned in a first direction; a plurality of charge-accumulating units, each being aligned with the corresponding photoelectric converting unit

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentEP3190622B1Solid-state imaging device
Publication Date: 2021.09.22 HAMAMATSU PHOTONICS KK
  • EP3190622B1 patent drawingFigure 1
  • EP3190622B1 patent drawingFigure 2
  • EP3190622B1 patent drawingFigure 3

AI summary

A solid-state imaging device SI includes a plurality of photoelectric converting units and a plurality of charge-accumulating units each accumulating a charge generated in the corresponding photoelectric converting unit. The photoelectric converting unit includes a photosensitive region that generates the charge in accordance with light incidence, and an electric potential gradient forming unit that accelerates migration of charge in a second direction D2 in the photosensitive region. The charge-accumulating unit includes: a plurality of regions (semiconductor layers) 22, 23, 24 having an impurity concentration gradually changed in one way in the second direction D2, and electrodes 32, 33 adapted to apply electric fields to the plurality of regions 22, 23, 24. The electrode 32 is disposed over the plurality of regions 22, 23 having the impurity concentration gradually varied. The electrode 33 is disposed over the plurality of regions 23, 24 having the impurity concentration gradually varied.