Imaging Device Multi-Level Signal Line Shielding

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Solution Overview

Problem

Stacked imaging devices face challenges in reducing noise levels, particularly due to kTC noises and parasitic capacitance, which cannot be adequately addressed by simple correlated double sampling, and traditional noise reduction methods often increase the device area.

Innovation Solution

The imaging device incorporates a multi-level signal line as a shield wire between interconnections to reduce parasitic capacitance coupling, using it to shield the charge storage region from noise, while maintaining a compact design by avoiding the need for additional shield wires.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a shield wire is added between interconnections to reduce parasitic capacitance coupling, then noise levels are reduced, but device area increases

Engineering Contradiction:
Improvenoise levelsVSAvoiddevice area
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The patent combines the shield wire function with the existing multi-level signal line by applying multiple voltage levels to it. Instead of adding a separate shield wire, the same conductive structure serves both as a signal transmission line and as a noise shield, thereby reducing parasitic capacitance coupling without increasing device area.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The multi-level signal line is given dual functionality: it transmits pixel signal data while simultaneously acting as a shield wire to reduce parasitic capacitance coupling between adjacent interconnections. This multi-functionality eliminates the need for dedicated shield wires and prevents area increase.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Object-affected harmful factors

If correlated double sampling is used to reduce kTC noises, then noise levels are reduced, but it cannot adequately address parasitic capacitance issues

Engineering Contradiction:
ImprovekTC noisesVSAvoidparasitic capacitance suppression
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent introduces a multi-level voltage signal as an intermediary mechanism to actively control and manage parasitic capacitance effects. By dynamically adjusting the voltage levels on the signal line, the parasitic capacitance coupling is actively suppressed, complementing the correlated double sampling technique and providing comprehensive noise reduction.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If additional shield wires are added to reduce parasitic capacitance, then coupling noise is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improveparasitic capacitance couplingVSAvoidinterconnection structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent merges the shield wire function with the existing signal line structure by utilizing multi-level voltage signaling. This combination eliminates the need for additional separate shield wire structures, thereby reducing manufacturing complexity while still achieving parasitic capacitance reduction.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces noise levels while preventing area increase, enhancing signal quality and maintaining a compact sensor size.

Implementation Method 1

a photoelectric converter that converts incident light into a signal charge

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Implementation Method 2

reduce parasitic capacitance coupling, using it to shield the charge storage region from noise

Methodology Applied
Scientific EffectParasitic capacitance: Parasitic Capacitance

Data Source

PatentUS11165979B2Imaging device including semiconductor substrate and pixels
Publication Date: 2021.11.02 PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
  • US11165979B2 patent drawing
  • US11165979B2 patent drawing
  • US11165979B2 patent drawing

AI summary

An imaging device includes: a semiconductor substrate; pixels arranged two-dimensionally along row and column directions on the substrate; and one or more interconnection layers located on the semiconductor substrate, including a first signal line extending along the column direction and a second signal line to which a multi-level signal is applied. A first pixel includes: a photoelectric converter; a charge storage region; a first interconnection electrically connected to the charge storage region; and a first transistor that includes a first diffusion layer electrically connected to the first signal line and a second diffusion layer electrically connected to the second signal line and that outputs a signal to the first signal line. The first and second signal lines and the first interconnection are arranged in a first interconnection layer. The second signal line is located between the first interconnection and the first signal line, viewed perpendicularly to the substrate.