Imaging Device Coordinates Observation Regions
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Solution Overview
Problem
Charged particle beam devices and optical microscopes face difficulties in specifying corresponding positions between multiple sample sections due to narrow fields of view at high magnification, making it challenging to align and observe the same positions across sections.
Innovation Solution
An imaging device calculates the coordinates of observation regions in one sample section based on correspondence relationships with characteristic points, allowing for the generation of observation images at these calculated coordinates, thereby facilitating alignment and observation across multiple sections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high magnification is used to observe sample sections, then observation detail is improved, but field of view becomes narrow making it difficult to specify corresponding positions between sections
Solution Approach 1:
The patent divides the observation process into two stages: first acquiring an overview image at low magnification to identify corresponding positions between sections, then using that information to guide high-magnification observation. This segmentation of observation scales resolves the contradiction by using each magnification level for its optimal purpose without interference.
Solution Approach 2:
The patent performs preliminary low-magnification observation to identify and record the positions of corresponding portions between sample sections before conducting high-magnification observation. This preliminary action establishes the spatial relationships needed to accurately locate corresponding features at higher magnification, overcoming the narrow field of view limitation.
2Measurement precision
If manual specification of characteristic points is performed for each section, then corresponding positions can be identified, but time consumption and operational complexity increase
Solution Approach 1:
The patent uses the low-magnification image as a template or copy to guide the identification of corresponding features in high-magnification images. By transferring the spatial information from the overview image to the detailed images, the system avoids redundant manual specification of all characteristic points, significantly reducing time and operational complexity while maintaining alignment accuracy.
Solution Approach 2:
The low-magnification overview image serves multiple functions: it provides spatial context for locating corresponding portions, guides the selection of characteristic points in high-magnification images, and enables verification of alignment accuracy. This multi-functionality reduces the overall time and complexity of the position alignment process.
Data Source
AI summary
An object of the invention is to easily acquire an image of a position corresponding between each section in an imaging device that acquires an image of a plurality of sample sections. The imaging device according to the invention calculates, according to a correspondence relationship between a characteristic point and a first observation region in a first sample section, coordinates of a second observation region of a second sample section, and generates an observation image at the calculated coordinates (see FIG. 7B).