Solid-State Imaging Element Counterbore Protrusions
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Solution Overview
Problem
The enlargement of the open portion in solid-state imaging elements to accommodate a shear tool for bond strength measurement leads to irregular light reflection, degrading image quality due to secondary reflections within the package.
Innovation Solution
A solid-state imaging element with protruding portions on the counterbore surface inside the open portion, periodically arranged and facing the light incident side, formed by etching a lens layer to reduce light reflection, and containing an organic substance, which scatters incident light and minimizes irregular reflections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the open portion is enlarged to insert a shear tool for bond strength measurement, then the ease of operation is improved, but irregular reflection of light occurs and image quality is degraded
Solution Approach 1:
The invention applies a specific surface structure (protruding portions) only to the counterbore surface inside the open portion, creating local optical modification exactly where light reflection occurs. This localized treatment suppresses irregular reflection without requiring changes to the overall package structure or enlarging the open portion further.
Solution Approach 2:
The protruding portions formed on the counterbore surface create a curved/rough surface topology that scatters and suppresses irregular light reflection. The three-dimensional protruding structure modifies the optical path of reflected light, preventing secondary reflections from entering the pixel while maintaining the necessary open portion dimensions for shear testing.
2Ease of operation
If the open portion is enlarged to insert a shear tool, then the ease of operation is improved, but the area of the open portion increases causing more light reflection
Solution Approach 1:
The surface structure modification is applied locally to the counterbore surface within the existing open portion, maximizing the utilization of the available area. The protruding portions are formed only on the counterbore surface, leaving the rest of the structure unchanged and maintaining minimal open portion area while still allowing shear tool insertion.
3Object-affected harmful factors
If protruding portions are formed on the counterbore surface to suppress irregular reflection, then image quality is improved, but the manufacturing complexity increases
Solution Approach 1:
The formation of protruding portions on the counterbore surface is integrated with the existing open portion formation process. By combining these operations, the patent avoids adding separate manufacturing steps specifically for creating the anti-reflection structure, thereby reducing overall manufacturing complexity while achieving the desired optical suppression effect.
Solution Approach 2:
The protruding portions are formed on the counterbore surface during the open portion formation process, before final assembly and packaging. This preliminary formation of the optical suppression structure allows subsequent processes to proceed without additional complexity, as the anti-reflection feature is already in place during critical manufacturing stages.
4Manufacturing precision
If the protruding portions are formed by etching the lens layer, then the manufacturing precision is improved, but the duration of the manufacturing process increases
Solution Approach 1:
The etching process for forming protruding portions is merged with the lens layer formation process. By performing these operations in sequence or simultaneously during the same manufacturing stage, the patent achieves precise protruding portion formation without requiring separate dedicated etching steps, thereby minimizing additional process time while maintaining high manufacturing precision.
Solution Approach 2:
The lens layer is formed with the protruding portions already incorporated during the initial fabrication stage. This preliminary formation approach allows the protruding portions to be created while the lens layer material is still being deposited or patterned, rather than requiring a separate post-processing etching step, thus reducing overall manufacturing duration while ensuring precise geometric control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The arrangement effectively suppresses irregular light reflections within the imaging element package, enhancing image quality by reducing reflectance to 5% or less across visible wavelengths.
Implementation Method 1
A plurality of protruding portions 41 is periodically arranged on a counterbore surface 39... effectively suppresses irregular light reflections within the imaging element package
Data Source
AI summary
The present disclosure relates to a solid-state imaging element, a manufacturing method, and an electronic apparatus, in which irregular reflection of light inside a solid-state imaging element package can be suppressed.In the solid-state imaging element, a plurality of pixels is planarly arranged, a connection portion utilized for connection to the outside is provided on a more outer side than an imaging region, and an open portion that is opened up to the connection portion from a light incident surface side of the imaging region where light is incident is formed. Additionally, a plurality of protruding portions periodically arranged is formed on a counterbore surface that is a surface inside the open portion excluding the connection portion. The present technology can be applied to, for example, a back-illuminated type or layered CMOS image sensor.