Solid-State Imaging Layout for Fast Shape Measurement Calibration

Solution Overview

Problem

The existing solid-state imaging devices used in shape measurement by the light section method cannot detect a two-dimensional intensity distribution of incident light, making it difficult to evaluate and adjust the optical setting state, which can degrade the accuracy of shape measurement.

Innovation Solution

A solid-state imaging device is designed with a first light receiving unit having pixel pairs arranged along a first direction, and a second light receiving unit with pixels generating charges based on light intensity, allowing for the evaluation of optical setting states by analyzing light incident positions and intensity distributions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a linear sensor with pixel pairs is used to reduce the number of pixels and shorten signal reading time, then productivity is improved, but the ability to detect two-dimensional intensity distribution is lost, worsening measurement precision

Engineering Contradiction:

Improvesignal reading speedVSAvoidoptical setting evaluation accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The light receiving unit is segmented into two distinct functional regions: a first light receiving unit with pixel pairs for high-speed shape measurement, and a second light receiving unit with single pixels for two-dimensional intensity distribution detection. This segmentation allows each region to specialize in its respective function, resolving the contradiction between speed and measurement capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The solid-state imaging device is designed to perform multiple functions through its dual light receiving units: it can conduct high-speed shape measurement using the first light receiving unit, and simultaneously evaluate optical setting states by detecting two-dimensional intensity distribution using the second light receiving unit. This multi-functionality eliminates the need to choose between speed and measurement precision.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Loss of time

If a linear sensor with pixel pairs is used to reduce pixel count, then the time for reading out signals is shortened, but the optical setting state cannot be evaluated, worsening reliability

Engineering Contradiction:

Improvesignal reading timeVSAvoidoptical setting evaluation capability

Core Design Contradiction:

Loss of timeVSReliability

Solution Approach 1:

The light receiving unit is segmented into two distinct functional regions: a first light receiving unit with pixel pairs for high-speed shape measurement, and a second light receiving unit with single pixels for two-dimensional intensity distribution detection. This segmentation allows each region to specialize in its respective function, resolving the contradiction between speed and measurement capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The solid-state imaging device is designed to perform multiple functions through its dual light receiving units: it can conduct high-speed shape measurement using the first light receiving unit, and simultaneously evaluate optical setting states by detecting two-dimensional intensity distribution using the second light receiving unit. This multi-functionality eliminates the need to choose between speed and measurement precision.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device enables effective evaluation and adjustment of optical settings, improving the accuracy and speed of shape measurements by the light section method.

Implementation Method 1

each of the plurality of pixel pairs of the first light receiving unit includes a first pixel and a second pixel arranged in juxtaposition along the first direction, and when line-shaped light extending in the first direction is incident on the first light receiving unit, as a light incident position varies from one side to another side in the second direction, a charge amount generated in the first pixel gradually decreases, and a charge amount generated in the second pixel gradually increases

Methodology Applied

Scientific EffectPhotoelectric Effect: Photoelectric Effect

Implementation Method 2

a second light receiving unit in which a plurality of pixels each for generating charges in an amount according to a light receiving amount are arrayed along a second direction intersecting with the first direction

Methodology Applied

Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS20250052562A1Solid-state imaging device, shape-measuring device, and shape-measuring method

Publication Date: 2025.02.13 HAMAMATSU PHOTONICS KK

AI summary

A solid-state imaging device includes a first light receiving unit and second light receiving units. In the first light receiving unit, a plurality of pixel pairs are arrayed along an x direction. In each of the second light receiving units, a plurality of pixels each for generating charges in an amount according to a light receiving amount are arrayed along a y direction. Each pixel pair includes a first pixel and a second pixel. When line-shaped light extending in the x direction is incident on the first light receiving unit, as a light incident position varies from one side to another side in the y direction, a charge amount generated in the first pixel gradually decreases, and a charge amount generated in the second pixel gradually increases.