Solid-State Imaging Polarization Layer Discharge Protection
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Solution Overview
Problem
The existing solid-state imaging apparatuses face issues with damage to wire grid polarizers and photoelectric conversion devices during the formation process due to charging and subsequent discharge, which is not effectively addressed in existing technologies.
Innovation Solution
The implementation of an imaging device with insulating layers on a substrate, including a polarization layer and photoelectric conversion regions, where the peripheral region has wiring layers that include pad portions in the same layer as the polarization layer, ensuring electrical connection and reducing the risk of damage from discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wire grid polarizers are formed with conventional methods, then the imaging device can achieve polarization functionality, but damage occurs to the wire grid polarizers and photoelectric conversion devices during formation due to charging and discharge
Solution Approach 1:
The patent applies preliminary action by forming a ground potential wiring layer before forming the wire grid polarizer. This ground layer is prepared in advance to provide a discharge path, preventing charge accumulation that would otherwise damage the polarizer or photoelectric conversion devices during the formation process.
Solution Approach 2:
The ground potential wiring layer acts as an intermediary element between the wire grid polarizer and the photoelectric conversion device. It provides a safe discharge path for accumulated charges, mediating the electrical interaction and preventing direct damage to sensitive components.
2Measurement precision
If the wire grid formation pitch is reduced to improve resolution, then smaller features can be resolved, but the formation process becomes more complex and susceptible to discharge damage
Solution Approach 1:
The ground potential wiring layer is formed in advance before the wire grid polarizer, creating a safety infrastructure that enables the formation of fine-pitch structures without discharge damage. This preliminary preparation allows manufacturers to proceed with complex high-resolution patterns with reduced risk.
3Device complexity
If the wire grid polarizer is formed without a ground reference, then the structure remains simple, but charging occurs during formation causing damage to the polarizer and photoelectric conversion devices
Solution Approach 1:
The ground potential wiring layer serves as an intermediary that provides a discharge path for accumulated charges. It is positioned between the wire grid polarizer and the photoelectric conversion device, safely channeling electrical discharge away from sensitive components while adding minimal structural complexity.
Solution Approach 2:
The ground potential wiring layer is strategically positioned in the peripheral region of the substrate, localized where discharge is most likely to occur during wire grid formation. This localized approach provides protection where needed without complicating the entire device structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents or reduces damage to wire grid polarizers and photoelectric conversion devices by ensuring electrical connection and minimizing discharge-related issues during the formation process, enhancing the reliability of the imaging apparatus.
Implementation Method 1
the electromagnetic wave, which oscillates in a plane parallel to the direction in which the wire grid extends (first direction), is selectively reflected and absorbed by the wire grid
Implementation Method 2
the electro-magnetic wave that has transmitted through the wire grid polarizer becomes a linearly polarized light beam in which the vertically polarized component is predominant
Implementation Method 3
a plurality of photoelectric conversion devices provided with the wire grid polarizers (WGPs)... configured to generate currents in response to entry of light beams
Data Source
AI summary
An imaging device includes one or more insulating layers on a substrate; an effective region including: a polarization layer in the one or more insulating layers and including one or more polarizers that polarize light; and at least one first photoelectric conversion region in the substrate and that converts incident light polarized by the one or more polarizers into electric charge; and a peripheral region outside the effective region and including: one or more wiring layers that include a pad portion in a same layer of the one or more insulating layers as the polarization layer.