Immersion Objective Lens for Deep 3D Lithography
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Solution Overview
Problem
Existing methods for spatially resolved introduction of electromagnetic radiation into photosensitive substances suffer from display errors and aberrations that increase with writing depth, limiting the height of three-dimensional structures that can be created.
Innovation Solution
The objective lens is dipped into the photosensitive substance, eliminating boundaries and allowing it to act as an immersion system, maintaining constant aberrations and enabling focused radiation across the writing area, thus avoiding display errors and extending the depth of three-dimensional structures that can be written.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the objective lens is positioned above the photosensitive substance with air or substrate boundaries, then the setup is simpler and easier to operate, but display errors and aberrations increase with writing depth, limiting the height of three-dimensional structures
Solution Approach 1:
The patent introduces an immersion medium (liquid or gel) as an intermediary substance between the objective lens and the photosensitive material. This intermediary eliminates the air-substrate boundaries that cause display errors and aberrations, allowing the electromagnetic radiation to pass through with constant optical properties throughout the writing depth, thereby resolving the contradiction between ease of setup and manufacturing precision
Solution Approach 2:
The patent changes the optical parameters of the medium surrounding the photosensitive substance by filling the space with an immersion liquid or gel that has matched refractive index properties. This parameter change eliminates refraction and reflection at boundaries, maintaining constant aberrations throughout the writing depth and enabling high-precision three-dimensional structuring
2Manufacturing precision
If the objective lens is dipped into the photosensitive substance as an immersion system, then constant aberrations are achieved and writing depth is extended, but the device complexity increases
Solution Approach 1:
The immersion liquid or gel serves as a mediator that simplifies the optical path by eliminating complex boundary effects. While the setup requires adding this medium, it removes the need for complex boundary correction systems and enables straightforward deep three-dimensional writing with constant spatial resolution throughout the writing depth
Solution Approach 2:
The patent creates a homogeneous optical environment by filling the space between the objective lens and photosensitive substance with an immersion medium of matched refractive index. This homogeneity eliminates variations in optical path and aberrations at different depths, achieving constant spatial resolution throughout the writing volume
3Ease of manufacture
If boundaries (air or substrate) are present between the objective lens and photosensitive substance, then the setup is simpler, but display errors increase with writing depth
Solution Approach 1:
The immersion liquid or gel acts as an intermediary that replaces the problematic air-substrate boundaries. This intermediary maintains optical continuity throughout the writing depth, eliminating refraction and reflection errors that would otherwise increase with depth, thereby improving reliability while maintaining ease of setup
Solution Approach 2:
The patent changes the physical parameters of the interface between lens and photosensitive material by introducing an immersion medium with matched optical properties. This parameter change eliminates the boundary effects that cause display errors, ensuring reliable performance throughout the writing depth
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the creation of higher and more precise three-dimensional structures with constant aberrations, achieving greater writing depth and spatial resolution without the limitations of prior art, while maintaining high precision and reducing display errors.
Implementation Method 1
electro-magnetic radiation is guided via an optic display system into the substance and is here projected on predetermined spatial coordinates, in order to create a change of the properties of the substance at these spatial coordinates
Implementation Method 2
projected by the optic display system on a volume with limited diffraction, thus in a focused fashion
Implementation Method 3
The photosensitive substance used within the scope of the present invention shows as the initial status a first, liquid state and can change its properties by photon radiation into at least a second state
Implementation Method 4
The electro-magnetic radiation used within the scope of the present invention usually represents light in the visible or infrared spectrum
Data Source
AI summary
A method for the spatially resolved introduction of an intensity pattern of electro-magnetic radiation by at least one optic display system into a photosensitive substance having properties which can be changed by photon exposure. These properties include a first, liquid and at least one second state, with the electro-magnetic radiation being conducted via the optic display system into the photosensitive substance and here being projected on predetermined spatial coordinates, in order to create at or in an area of these spatial coordinates a change of the properties of the substance. A surface of an objective lens of the optic display system, through which the electro-magnetic radiation 4 is emitted, is immersed in the liquid photosensitive substance 2. A corresponding device is provided, and the device and method can be used for the creation of micro or nano-scaled structures.