Immersion Lens Detector Pixels for High-NA Photon Collection

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Solution Overview

Problem

Electromagnetic radiation detectors face challenges in reducing shot noise from dark current, which degrades the signal-to-noise ratio, particularly when trying to minimize the detector pixel area to decrease dark current, as this also reduces the number of photons that can be collected.

Innovation Solution

The integration of an immersion lens directly bonded to the detector pixel without adhesives, eliminating air and adhesive-related issues, allows for increased numerical aperture and improved signal-to-noise ratio by focusing photons onto a smaller collection area while maintaining the benefits of separate manufacturing for the lens and detector pixel stack.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the detector pixel area is minimized to decrease dark current, then the shot noise from dark current is reduced, but the number of photons that can be collected is also reduced

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidnumber of photons collected
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent merges the lens and detector pixel into a single integrated structure where the lens is formed as part of the detector pixel stack. This integration allows the lens to be positioned extremely close to the absorber with no air gaps, maximizing the numerical aperture and photon collection efficiency while maintaining a small pixel area to keep dark current low.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extends the optical collection in the angular dimension by achieving a numerical aperture greater than 1.0 through the integrated lens structure. This dimensional approach to light collection allows capturing photons from a wider range of incident angles without increasing the pixel footprint, thus resolving the contradiction between small area and high photon collection.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If adhesive is used to bond the lens to the detector pixel, then the lens can be attached to the detector pixel, but the adhesive thickness limits the numerical aperture and introduces air gaps

Engineering Contradiction:
Improvelens attachmentVSAvoidnumerical aperture
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The lens and detector pixel are merged into a single monolithic structure formed through epitaxial growth. This eliminates the need for adhesive bonding entirely, removing the limiting factor of adhesive thickness and enabling a numerical aperture greater than 1.0 without air gaps between the lens and absorber.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent uses epitaxial layers as an intermediary medium to integrate the lens and detector pixel. These layers serve as both the structural foundation for the lens and the active detection region, providing a seamless transition between optical and detection functions without requiring external adhesives.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If the lens is formed separately and bonded to the detector pixel stack, then the lens and detector can be manufactured independently, but the bonding process introduces complexity and potential misalignment

Engineering Contradiction:
Improveseparate manufacturingVSAvoidbonding process
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The lens and detector pixel are formed together in a single epitaxial growth process, eliminating the separate bonding step and associated alignment complexities. The integrated structure is manufactured as one unified component, simplifying the overall manufacturing process while maintaining the ability to independently design lens and detector parameters.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

While integrated, the structure maintains functional segmentation with distinct lens and absorber regions formed through controlled epitaxial growth. This allows independent optimization of each component's properties during the growth process without requiring physical separation or bonding steps.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the signal-to-noise ratio by increasing the range of position and incident angle pairs that can be collected, reducing the impact of buffer layers, and allowing for higher numerical aperture without the limitations of current adhesive thickness, thereby improving the detection efficiency of electromagnetic radiation.

Implementation Method 1

An immersion lens may be directly bonded to a layer of material forming part of the electromagnetic radiation detector

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

allows for increased numerical aperture and improved signal-to-noise ratio by focusing photons onto a smaller collection area

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 3

The set of epitaxial layers may define an electromagnetic radiation absorber

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS12125865B2Electromagnetic radiation detectors integrated with immersion lenses
Publication Date: 2024.10.22 APPLE INC
  • US12125865B2 patent drawing
  • US12125865B2 patent drawing
  • US12125865B2 patent drawing

AI summary

An electromagnetic radiation detector pixel includes a set of epitaxial layers and a lens. The set of epitaxial layers defines an electromagnetic radiation absorber. The lens is directly bonded to the set of epitaxial layers.