Immersion Lens X-ray Source for High Intensity Small Spot

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Solution Overview

Problem

Existing x-ray sources face limitations in resolution and operating life due to large source sizes and tradeoffs between intensity and beam quality, with increased electron-beam current leading to larger beam diameters and reduced target life.

Innovation Solution

An x-ray source with a magnetic focusing lens and an immersion lens that focuses electrons to a small spot on a target, allowing for higher intensity without increasing beam diameter and extending target life, using a sealed tube with a power-supply circuit and optional electrostatic lens for collimation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If electron-beam current is increased to improve x-ray intensity, then x-ray intensity is improved, but cross-sectional diameter of electron beam and x-ray beam increases

Engineering Contradiction:
Improvex-ray intensityVSAvoidbeam cross-sectional diameter
Core Design Contradiction:
Illumination intensityVSArea of stationary object

Solution Approach 1:

The patent changes the magnetic field distribution parameters by introducing an immersion lens configuration where the peak magnetic field occurs proximate to the target plane. This parameter change enables the system to achieve higher electron-beam current while maintaining a small focused spot size, thereby increasing x-ray intensity without increasing beam diameter.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The immersion lens acts as an intermediary element between the electron source and the target. By positioning the peak magnetic field proximate to the target, the lens mediates the focusing of electrons to a small spot, enabling high current operation without beam diameter increase.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Illumination intensity

If electron-beam current is increased to improve x-ray intensity, then x-ray intensity is improved, but operating life of target decreases

Engineering Contradiction:
Improvex-ray intensityVSAvoidtarget operating life
Core Design Contradiction:
Illumination intensityVSDuration of action of stationary object

Solution Approach 1:

The patent modifies the magnetic field parameter distribution by implementing an immersion lens with peak field proximate to the target. This enables concentration of electron beam current into a smaller spot area, increasing x-ray intensity while distributing the thermal load to extend target operating life through improved heat management.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If conventional magnetic focusing lens is used, then electron beam can be focused, but peak magnetic field location limits resolution and intensity

Engineering Contradiction:
Improvespot sizeVSAvoidx-ray intensity
Core Design Contradiction:
Manufacturing precisionVSIllumination intensity

Solution Approach 1:

The patent inverts the conventional magnetic lens design by placing the peak magnetic field proximate to the target rather than at the lens center. This inversion enables the focused spot size to be determined by the target plane location, achieving both small spot size for high resolution and high current capability for high intensity.

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The x-ray source achieves high-resolution imaging with improved intensity and extended target life, enabling compact and portable applications while maintaining beam quality.

Implementation Method 1

a magnetic focusing lens that focuses the beam of electrons to a spot, having a spot size, on a target, where the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of a magnetic field associated with the magnetic focusing lens occurs proximate to a plane of the target

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

an electron source that emits a beam of electrons... in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays

Methodology Applied
Scientific EffectElectron impact: Electron Impact Desorption

Data Source

PatentUS9142382B2X-ray source with an immersion lens
Publication Date: 2015.09.22 CARL ZEISS X-RAY MICROSCOPY INC
  • US9142382B2 patent drawing
  • US9142382B2 patent drawing
  • US9142382B2 patent drawing

AI summary

An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.