Impedance Matching Device Input Port Voltage Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional impedance matching devices for plasma processing systems require complex structures and additional detectors at the output port to measure the peak-to-peak value of high-frequency voltage, leading to increased size, cost, and maintenance needs.
Innovation Solution
An impedance matching device that calculates the peak-to-peak value of high-frequency voltage using forward and reflected wave voltages detected at the input port, eliminating the need for a detector at the output port by employing a T-parameter memory and computation formula, and includes an abnormality detector and safety countermeasures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a Vpp detector is provided at the output port to detect the peak-to-peak value of high-frequency voltage, then the p-p value can be detected, but the device structure becomes complicated and size increases
Solution Approach 1:
A directional coupler is introduced as an intermediary component to sample the forward and reflected waves at the input port. This coupler enables indirect measurement of the output voltage characteristics without requiring direct access to the output port, thereby avoiding the need for a Vpp detector at the output and simplifying the overall device structure.
Solution Approach 2:
The invention creates a copy of the voltage information by sampling the forward and reflected waves at the input port through the directional coupler. Instead of directly measuring the output voltage, the system copies the relevant voltage characteristics and processes them through computation, eliminating the need for a physical Vpp detector at the output port.
2Measurement precision
If a Vpp detector is provided at the output port, then the p-p value can be detected, but the device size increases
Solution Approach 1:
The directional coupler acts as a mediator that enables voltage sampling at the input port, eliminating the need for space-consuming detection circuits at the output port. This approach reduces the overall device volume by relocating the detection function to a different location in the system.
Solution Approach 2:
By copying the voltage information through the directional coupler and processing it computationally, the invention eliminates the need for bulky Vpp detector hardware at the output port, thereby reducing the device's overall volume.
3Measurement precision
If a Vpp detector is provided at the output port, then the p-p value can be detected, but manufacturing cost increases
Solution Approach 1:
The invention uses a copying approach where voltage information is sampled at the input port and processed computationally. This eliminates the need for expensive Vpp detector components at the output port, thereby reducing manufacturing costs while maintaining detection capability.
Solution Approach 2:
The invention replaces the physical Vpp detector hardware with a computational approach. By using a directional coupler to sample signals and a controller to compute the p-p value, the system substitutes expensive detection hardware with more cost-effective components and software-based processing.
4Measurement precision
If a Vpp detector is provided at the output port, then the p-p value can be detected, but maintenance requirements increase
Solution Approach 1:
By copying voltage information through the directional coupler and processing it computationally, the invention eliminates the Vpp detector component that would require maintenance. This reduces maintenance requirements by removing the need for detector calibration, troubleshooting, and repair.
Solution Approach 2:
The invention substitutes the physical Vpp detector with a computational system. This replacement eliminates the maintenance needs associated with detector hardware, as software-based computation and control are more reliable and require minimal maintenance compared to physical detection components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the size and manufacturing cost of the impedance matching device, eliminates maintenance needs, and simplifies the circuit structure while maintaining accurate impedance matching and abnormality detection.
Implementation Method 1
an impedance variable circuit (202) having a plurality of impedance values
Implementation Method 2
an input voltage detector that detects a forward wave voltage and a reflected wave voltage at the input port
Data Source
AI summary
An impedance matching device includes an input port connected to a high-frequency power supply, an output port connected to a load, an impedance variable circuit, a T-parameter memory for storing sets of T-parameters in a manner such that each of the sets of T-parameters is related to a corresponding one of adjustable impedance values of the device, an input voltage detector for detecting a forward wave voltage and a reflected wave voltage at the input port, and a p-p value calculator for computation of a p-p value of a high-frequency voltage at the output port. The computation of the p-p value of the high-frequency voltage is performed by using the forward wave voltage and the reflected wave voltage detected at the input port and also using one set of the T-parameters stored in the T-parameter memory.