Impedance Matching System Using Normalized Control Parameters

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Solution Overview

Problem

Traditional impedance matching methods face challenges such as convergence failure due to initial state dependency, instability near the matching point, and high dependency on load and power transmission line impedance, leading to inefficient power transfer and control issues in systems like plasma and communication systems.

Innovation Solution

An impedance matching method operating in a pulse mode, where the power source is classified into slow and fast pulse modes based on pulse period, allowing for differential control parameter settings to stabilize matching, using a sensing unit, measurement result analyzer, and controller to process electrical characteristics and adjust matching system reactance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional impedance matching methods are used, then impedance matching can be achieved, but convergence failure occurs due to brute dependency on initial state

Engineering Contradiction:

Improvematching convergenceVSAvoidinitial state dependency

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent transforms the impedance matching problem by changing the parameter representation from un-normalized impedance magnitude to normalized impedance. This parameter transformation eliminates the dependency on initial capacitance values and enables consistent convergence to the matching state regardless of starting conditions.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent implements a feedback mechanism where the control parameters are continuously adjusted based on the measured impedance characteristics. The system measures the actual impedance, compares it with the target matching impedance, and uses this feedback to iteratively adjust the capacitance values until convergence is achieved, thereby eliminating initial state dependency.

Inventive Principle:

Principle #23Feedback

2Productivity

If traditional impedance matching methods are used, then matching can be performed, but matching delay occurs according to instability near matching position

Engineering Contradiction:

Improvematching speedVSAvoidmatching position stability

Core Design Contradiction:

ProductivityVSStability of the object's composition

Solution Approach 1:

The patent changes the control parameter from direct capacitance magnitude to normalized impedance-based control parameters. This transformation provides stable and predictable control behavior near the matching position, eliminating the instability that causes matching delays while maintaining fast convergence speed.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If traditional impedance matching methods are used, then impedance matching can be achieved, but haunting issue occurs according to high dependency on load and power transmission line impedance

Engineering Contradiction:

Improvematching stabilityVSAvoidimpedance dependency

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent creates a universal impedance matching method that works across different load impedances and power transmission line configurations. By using normalized impedance as the control basis, the system achieves adaptability to various impedance conditions while maintaining stable matching performance, eliminating the haunting issue caused by high impedance dependency.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS8120259B2Impedance matching methods and systems performing the same

Publication Date: 2012.02.21 MKS KOREA LTD

AI summary

Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line; determining a pulse mode of the power source; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system through the control parameter, wherein the matching system is controlled differently according to the pulse mode.